JPS4877888A - - Google Patents

Info

Publication number
JPS4877888A
JPS4877888A JP747972A JP747972A JPS4877888A JP S4877888 A JPS4877888 A JP S4877888A JP 747972 A JP747972 A JP 747972A JP 747972 A JP747972 A JP 747972A JP S4877888 A JPS4877888 A JP S4877888A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP747972A
Other languages
Japanese (ja)
Other versions
JPS5214992B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP747972A priority Critical patent/JPS5214992B2/ja
Publication of JPS4877888A publication Critical patent/JPS4877888A/ja
Publication of JPS5214992B2 publication Critical patent/JPS5214992B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP747972A 1972-01-19 1972-01-19 Expired JPS5214992B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP747972A JPS5214992B2 (cs) 1972-01-19 1972-01-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP747972A JPS5214992B2 (cs) 1972-01-19 1972-01-19

Publications (2)

Publication Number Publication Date
JPS4877888A true JPS4877888A (cs) 1973-10-19
JPS5214992B2 JPS5214992B2 (cs) 1977-04-26

Family

ID=11666893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP747972A Expired JPS5214992B2 (cs) 1972-01-19 1972-01-19

Country Status (1)

Country Link
JP (1) JPS5214992B2 (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51989A (ja) * 1974-06-21 1976-01-07 Yaskawa Denki Seisakusho Kk Ketsukankenshutsusochi
JPS52114775U (cs) * 1976-02-27 1977-08-31
JP2018072088A (ja) * 2016-10-26 2018-05-10 株式会社ニューフレアテクノロジー 検査装置および変位量検出方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51989A (ja) * 1974-06-21 1976-01-07 Yaskawa Denki Seisakusho Kk Ketsukankenshutsusochi
JPS52114775U (cs) * 1976-02-27 1977-08-31
JP2018072088A (ja) * 2016-10-26 2018-05-10 株式会社ニューフレアテクノロジー 検査装置および変位量検出方法

Also Published As

Publication number Publication date
JPS5214992B2 (cs) 1977-04-26

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