JPS4877766A - - Google Patents

Info

Publication number
JPS4877766A
JPS4877766A JP782872A JP782872A JPS4877766A JP S4877766 A JPS4877766 A JP S4877766A JP 782872 A JP782872 A JP 782872A JP 782872 A JP782872 A JP 782872A JP S4877766 A JPS4877766 A JP S4877766A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP782872A
Other languages
Japanese (ja)
Other versions
JPS5132497B2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP782872A priority Critical patent/JPS5132497B2/ja
Priority to US05/322,522 priority patent/US3933538A/en
Publication of JPS4877766A publication Critical patent/JPS4877766A/ja
Publication of JPS5132497B2 publication Critical patent/JPS5132497B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP782872A 1972-01-18 1972-01-19 Expired JPS5132497B2 (enrdf_load_html_response)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP782872A JPS5132497B2 (enrdf_load_html_response) 1972-01-19 1972-01-19
US05/322,522 US3933538A (en) 1972-01-18 1973-01-10 Method and apparatus for production of liquid phase epitaxial layers of semiconductors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP782872A JPS5132497B2 (enrdf_load_html_response) 1972-01-19 1972-01-19

Publications (2)

Publication Number Publication Date
JPS4877766A true JPS4877766A (enrdf_load_html_response) 1973-10-19
JPS5132497B2 JPS5132497B2 (enrdf_load_html_response) 1976-09-13

Family

ID=11676443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP782872A Expired JPS5132497B2 (enrdf_load_html_response) 1972-01-18 1972-01-19

Country Status (1)

Country Link
JP (1) JPS5132497B2 (enrdf_load_html_response)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5069969A (enrdf_load_html_response) * 1973-10-24 1975-06-11
JPS515956A (enrdf_load_html_response) * 1974-07-04 1976-01-19 Nippon Telegraph & Telephone
JPS5166773A (enrdf_load_html_response) * 1974-12-05 1976-06-09 Fujitsu Ltd
JPS51114067A (en) * 1975-04-01 1976-10-07 Nippon Telegr & Teleph Corp <Ntt> Liquid phase epitaxial growth towards the top of alxga1-xas base
JPS51114384A (en) * 1975-04-01 1976-10-08 Nippon Telegr & Teleph Corp <Ntt> Liquid phase epitaxial crystal growth
JPS52141172A (en) * 1976-05-20 1977-11-25 Stanley Electric Co Ltd Continuous liquiddgrowth method
JPS52142477A (en) * 1976-05-21 1977-11-28 Stanley Electric Co Ltd Liquid epitaxial growth method
JPS554947A (en) * 1978-06-28 1980-01-14 Fujitsu Ltd Method of growing liquid phase epitaxial
JPS56129319A (en) * 1980-03-14 1981-10-09 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS58148426A (ja) * 1982-03-01 1983-09-03 Semiconductor Res Found 成長装置

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5069969A (enrdf_load_html_response) * 1973-10-24 1975-06-11
JPS515956A (enrdf_load_html_response) * 1974-07-04 1976-01-19 Nippon Telegraph & Telephone
JPS5166773A (enrdf_load_html_response) * 1974-12-05 1976-06-09 Fujitsu Ltd
JPS51114067A (en) * 1975-04-01 1976-10-07 Nippon Telegr & Teleph Corp <Ntt> Liquid phase epitaxial growth towards the top of alxga1-xas base
JPS51114384A (en) * 1975-04-01 1976-10-08 Nippon Telegr & Teleph Corp <Ntt> Liquid phase epitaxial crystal growth
JPS52141172A (en) * 1976-05-20 1977-11-25 Stanley Electric Co Ltd Continuous liquiddgrowth method
JPS52142477A (en) * 1976-05-21 1977-11-28 Stanley Electric Co Ltd Liquid epitaxial growth method
JPS554947A (en) * 1978-06-28 1980-01-14 Fujitsu Ltd Method of growing liquid phase epitaxial
JPS56129319A (en) * 1980-03-14 1981-10-09 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS58148426A (ja) * 1982-03-01 1983-09-03 Semiconductor Res Found 成長装置

Also Published As

Publication number Publication date
JPS5132497B2 (enrdf_load_html_response) 1976-09-13

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