JPS4877306A - - Google Patents
Info
- Publication number
- JPS4877306A JPS4877306A JP796572A JP796572A JPS4877306A JP S4877306 A JPS4877306 A JP S4877306A JP 796572 A JP796572 A JP 796572A JP 796572 A JP796572 A JP 796572A JP S4877306 A JPS4877306 A JP S4877306A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Induction Machinery (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP796572A JPS4877306A (en:Method) | 1972-01-20 | 1972-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP796572A JPS4877306A (en:Method) | 1972-01-20 | 1972-01-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4877306A true JPS4877306A (en:Method) | 1973-10-17 |
Family
ID=11680167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP796572A Pending JPS4877306A (en:Method) | 1972-01-20 | 1972-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4877306A (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160131927A (ko) | 2015-05-07 | 2016-11-16 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 포지티브형 레지스트 조성물 및 패턴 형성 방법 |
-
1972
- 1972-01-20 JP JP796572A patent/JPS4877306A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160131927A (ko) | 2015-05-07 | 2016-11-16 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 포지티브형 레지스트 조성물 및 패턴 형성 방법 |