JPS487625A - - Google Patents

Info

Publication number
JPS487625A
JPS487625A JP5611472A JP5611472A JPS487625A JP S487625 A JPS487625 A JP S487625A JP 5611472 A JP5611472 A JP 5611472A JP 5611472 A JP5611472 A JP 5611472A JP S487625 A JPS487625 A JP S487625A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5611472A
Other languages
Japanese (ja)
Other versions
JPS523795B1 (2
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS487625A publication Critical patent/JPS487625A/ja
Publication of JPS523795B1 publication Critical patent/JPS523795B1/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00Etching of wafers, substrates or parts of devices
    • H10P50/69Etching of wafers, substrates or parts of devices using masks for semiconductor materials
    • H10P50/691Etching of wafers, substrates or parts of devices using masks for semiconductor materials for Group V materials or Group III-V materials
    • H10P50/692Etching of wafers, substrates or parts of devices using masks for semiconductor materials for Group V materials or Group III-V materials characterised by their composition, e.g. multilayer masks or materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/10Screens on or from which an image or pattern is formed, picked up, converted or stored
    • H01J29/36Photoelectric screens; Charge-storage screens
    • H01J29/39Charge-storage screens
    • H01J29/45Charge-storage screens exhibiting internal electric effects caused by electromagnetic radiation, e.g. photoconductive screen, photodielectric screen, photovoltaic screen
    • H01J29/451Charge-storage screens exhibiting internal electric effects caused by electromagnetic radiation, e.g. photoconductive screen, photodielectric screen, photovoltaic screen with photosensitive junctions
    • H01J29/453Charge-storage screens exhibiting internal electric effects caused by electromagnetic radiation, e.g. photoconductive screen, photodielectric screen, photovoltaic screen with photosensitive junctions provided with diode arrays
    • H01J29/455Charge-storage screens exhibiting internal electric effects caused by electromagnetic radiation, e.g. photoconductive screen, photodielectric screen, photovoltaic screen with photosensitive junctions provided with diode arrays formed on a silicon substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • H01J9/233Manufacture of photoelectric screens or charge-storage screens
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00Subject matter not provided for in other groups of this subclass
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00Semiconductor device manufacturing: process
    • Y10S438/942Masking
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00Semiconductor device manufacturing: process
    • Y10S438/977Thinning or removal of substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Weting (AREA)
  • ing And Chemical Polishing (AREA)
  • Catalysts (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Low-Molecular Organic Synthesis Reactions Using Catalysts (AREA)
JP47056114A 1971-06-07 1972-06-07 Pending JPS523795B1 (2)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US15034571A 1971-06-07 1971-06-07

Publications (2)

Publication Number Publication Date
JPS487625A true JPS487625A (2) 1973-01-31
JPS523795B1 JPS523795B1 (2) 1977-01-29

Family

ID=22534114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47056114A Pending JPS523795B1 (2) 1971-06-07 1972-06-07

Country Status (7)

Country Link
US (3) US3701705A (2)
JP (1) JPS523795B1 (2)
CA (1) CA930654A (2)
DE (1) DE2226237C3 (2)
FR (1) FR2141205A5 (2)
GB (1) GB1389106A (2)
IT (1) IT959057B (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5239641A (en) * 1975-09-23 1977-03-28 Union Carbide Corp Process for preparing 22phenyl ethanol
JPS5331635A (en) * 1976-09-01 1978-03-25 Toyo Soda Mfg Co Ltd Preparation of beta-phenylethyl alcohol

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3929551A (en) * 1974-07-11 1975-12-30 Buckbee Mears Co Sealing apparatus for continuous moving web
US3954940A (en) * 1974-11-04 1976-05-04 Mcdonnell Douglas Corporation Process for surface work strain relief of electrooptic crystals
US3953265A (en) * 1975-04-28 1976-04-27 International Business Machines Corporation Meniscus-contained method of handling fluids in the manufacture of semiconductor wafers
US4011144A (en) * 1975-12-22 1977-03-08 Western Electric Company Methods of forming metallization patterns on beam lead semiconductor devices
US4085038A (en) * 1976-12-15 1978-04-18 Western Electric Co., Inc. Methods of and apparatus for sorting parts of a separated article
US4384919A (en) * 1978-11-13 1983-05-24 Sperry Corporation Method of making x-ray masks
US4222815A (en) * 1979-06-04 1980-09-16 The Babcock & Wilcox Company Isotropic etching of silicon strain gages
FR2462828B1 (fr) * 1979-07-25 1985-09-27 Rca Corp Procede de fabrication de dispositifs de formation d'image a substrat aminci pour tube analyseur de television par exemple
US4268374A (en) * 1979-08-09 1981-05-19 Bell Telephone Laboratories, Incorporated High capacity sputter-etching apparatus
US4585513A (en) * 1985-01-30 1986-04-29 Rca Corporation Method for removing glass support from semiconductor device
US4671850A (en) * 1985-08-16 1987-06-09 Micronix Corporation Mask using polyimide to support a patterned x-ray opaque layer
US5127984A (en) * 1991-05-02 1992-07-07 Avantek, Inc. Rapid wafer thinning process
DE4202194C2 (de) * 1992-01-28 1996-09-19 Fairchild Convac Gmbh Geraete Verfahren und Vorrichtung zum partiellen Entfernen von dünnen Schichten von einem Substrat
KR101232181B1 (ko) * 2010-02-03 2013-02-12 엘지디스플레이 주식회사 마스크 어셈블리

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5239641A (en) * 1975-09-23 1977-03-28 Union Carbide Corp Process for preparing 22phenyl ethanol
JPS5331635A (en) * 1976-09-01 1978-03-25 Toyo Soda Mfg Co Ltd Preparation of beta-phenylethyl alcohol

Also Published As

Publication number Publication date
IT959057B (it) 1973-11-10
GB1389106A (en) 1975-04-03
FR2141205A5 (2) 1973-01-19
US3823048A (en) 1974-07-09
DE2226237B2 (de) 1978-10-05
DE2226237C3 (de) 1979-06-07
DE2226237A1 (de) 1973-01-04
US3841930A (en) 1974-10-15
US3701705A (en) 1972-10-31
CA930654A (en) 1973-07-24
JPS523795B1 (2) 1977-01-29

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