JPS4875291A - - Google Patents
Info
- Publication number
- JPS4875291A JPS4875291A JP47005203A JP520372A JPS4875291A JP S4875291 A JPS4875291 A JP S4875291A JP 47005203 A JP47005203 A JP 47005203A JP 520372 A JP520372 A JP 520372A JP S4875291 A JPS4875291 A JP S4875291A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47005203A JPS5213439B2 (ja) | 1972-01-12 | 1972-01-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47005203A JPS5213439B2 (ja) | 1972-01-12 | 1972-01-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4875291A true JPS4875291A (ja) | 1973-10-11 |
| JPS5213439B2 JPS5213439B2 (ja) | 1977-04-14 |
Family
ID=11604623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47005203A Expired JPS5213439B2 (ja) | 1972-01-12 | 1972-01-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5213439B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10118204A (ja) * | 1996-08-30 | 1998-05-12 | Hitachi Ltd | 荷電粒子ビーム装置およびその運転方法 |
-
1972
- 1972-01-12 JP JP47005203A patent/JPS5213439B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10118204A (ja) * | 1996-08-30 | 1998-05-12 | Hitachi Ltd | 荷電粒子ビーム装置およびその運転方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5213439B2 (ja) | 1977-04-14 |