JPS4874484A - - Google Patents

Info

Publication number
JPS4874484A
JPS4874484A JP519472A JP519472A JPS4874484A JP S4874484 A JPS4874484 A JP S4874484A JP 519472 A JP519472 A JP 519472A JP 519472 A JP519472 A JP 519472A JP S4874484 A JPS4874484 A JP S4874484A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP519472A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP519472A priority Critical patent/JPS4874484A/ja
Publication of JPS4874484A publication Critical patent/JPS4874484A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP519472A 1972-01-12 1972-01-12 Pending JPS4874484A (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP519472A JPS4874484A (it) 1972-01-12 1972-01-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP519472A JPS4874484A (it) 1972-01-12 1972-01-12

Publications (1)

Publication Number Publication Date
JPS4874484A true JPS4874484A (it) 1973-10-06

Family

ID=11604388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP519472A Pending JPS4874484A (it) 1972-01-12 1972-01-12

Country Status (1)

Country Link
JP (1) JPS4874484A (it)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54101779A (en) * 1978-01-16 1979-08-10 Western Electric Co Epitaxial thin film growth method
JPS5936925A (ja) * 1982-08-25 1984-02-29 Canon Inc 分子線発生装置
JPS61222986A (ja) * 1984-08-13 1986-10-03 Agency Of Ind Science & Technol 結晶成長膜厚制御法
JPS61227164A (ja) * 1985-03-29 1986-10-09 Agency Of Ind Science & Technol 固体蒸発制御法
JPS62123709A (ja) * 1985-11-25 1987-06-05 Mitsubishi Electric Corp 薄膜成形装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54101779A (en) * 1978-01-16 1979-08-10 Western Electric Co Epitaxial thin film growth method
JPS5745715B2 (it) * 1978-01-16 1982-09-29 Western Electric Co
JPS5936925A (ja) * 1982-08-25 1984-02-29 Canon Inc 分子線発生装置
JPH0554252B2 (it) * 1982-08-25 1993-08-12 Canon Kk
JPS61222986A (ja) * 1984-08-13 1986-10-03 Agency Of Ind Science & Technol 結晶成長膜厚制御法
JPS61227164A (ja) * 1985-03-29 1986-10-09 Agency Of Ind Science & Technol 固体蒸発制御法
JPH053437B2 (it) * 1985-03-29 1993-01-14 Kogyo Gijutsuin
JPS62123709A (ja) * 1985-11-25 1987-06-05 Mitsubishi Electric Corp 薄膜成形装置

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