JPS4874484A - - Google Patents
Info
- Publication number
- JPS4874484A JPS4874484A JP519472A JP519472A JPS4874484A JP S4874484 A JPS4874484 A JP S4874484A JP 519472 A JP519472 A JP 519472A JP 519472 A JP519472 A JP 519472A JP S4874484 A JPS4874484 A JP S4874484A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP519472A JPS4874484A (de) | 1972-01-12 | 1972-01-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP519472A JPS4874484A (de) | 1972-01-12 | 1972-01-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4874484A true JPS4874484A (de) | 1973-10-06 |
Family
ID=11604388
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP519472A Pending JPS4874484A (de) | 1972-01-12 | 1972-01-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4874484A (de) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54101779A (en) * | 1978-01-16 | 1979-08-10 | Western Electric Co | Epitaxial thin film growth method |
| JPS5936925A (ja) * | 1982-08-25 | 1984-02-29 | Canon Inc | 分子線発生装置 |
| JPS61222986A (ja) * | 1984-08-13 | 1986-10-03 | Agency Of Ind Science & Technol | 結晶成長膜厚制御法 |
| JPS61227164A (ja) * | 1985-03-29 | 1986-10-09 | Agency Of Ind Science & Technol | 固体蒸発制御法 |
| JPS62123709A (ja) * | 1985-11-25 | 1987-06-05 | Mitsubishi Electric Corp | 薄膜成形装置 |
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1972
- 1972-01-12 JP JP519472A patent/JPS4874484A/ja active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54101779A (en) * | 1978-01-16 | 1979-08-10 | Western Electric Co | Epitaxial thin film growth method |
| JPS5745715B2 (de) * | 1978-01-16 | 1982-09-29 | Western Electric Co | |
| JPS5936925A (ja) * | 1982-08-25 | 1984-02-29 | Canon Inc | 分子線発生装置 |
| JPH0554252B2 (de) * | 1982-08-25 | 1993-08-12 | Canon Kk | |
| JPS61222986A (ja) * | 1984-08-13 | 1986-10-03 | Agency Of Ind Science & Technol | 結晶成長膜厚制御法 |
| JPS61227164A (ja) * | 1985-03-29 | 1986-10-09 | Agency Of Ind Science & Technol | 固体蒸発制御法 |
| JPH053437B2 (de) * | 1985-03-29 | 1993-01-14 | Kogyo Gijutsuin | |
| JPS62123709A (ja) * | 1985-11-25 | 1987-06-05 | Mitsubishi Electric Corp | 薄膜成形装置 |