JPS4874483A - - Google Patents

Info

Publication number
JPS4874483A
JPS4874483A JP545172A JP545172A JPS4874483A JP S4874483 A JPS4874483 A JP S4874483A JP 545172 A JP545172 A JP 545172A JP 545172 A JP545172 A JP 545172A JP S4874483 A JPS4874483 A JP S4874483A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP545172A
Other languages
Japanese (ja)
Other versions
JPS5431472B2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP545172A priority Critical patent/JPS5431472B2/ja
Publication of JPS4874483A publication Critical patent/JPS4874483A/ja
Publication of JPS5431472B2 publication Critical patent/JPS5431472B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP545172A 1972-01-10 1972-01-10 Expired JPS5431472B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP545172A JPS5431472B2 (enExample) 1972-01-10 1972-01-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP545172A JPS5431472B2 (enExample) 1972-01-10 1972-01-10

Publications (2)

Publication Number Publication Date
JPS4874483A true JPS4874483A (enExample) 1973-10-06
JPS5431472B2 JPS5431472B2 (enExample) 1979-10-06

Family

ID=11611559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP545172A Expired JPS5431472B2 (enExample) 1972-01-10 1972-01-10

Country Status (1)

Country Link
JP (1) JPS5431472B2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58148424A (ja) * 1982-02-26 1983-09-03 Sony Corp 気相成長法
JPH02244712A (ja) * 1989-03-17 1990-09-28 Sony Corp プラズマ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58148424A (ja) * 1982-02-26 1983-09-03 Sony Corp 気相成長法
JPH02244712A (ja) * 1989-03-17 1990-09-28 Sony Corp プラズマ装置

Also Published As

Publication number Publication date
JPS5431472B2 (enExample) 1979-10-06

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