JPS4874241A - - Google Patents
Info
- Publication number
- JPS4874241A JPS4874241A JP143772A JP143772A JPS4874241A JP S4874241 A JPS4874241 A JP S4874241A JP 143772 A JP143772 A JP 143772A JP 143772 A JP143772 A JP 143772A JP S4874241 A JPS4874241 A JP S4874241A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP143772A JPS4874241A (ja) | 1971-12-29 | 1971-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP143772A JPS4874241A (ja) | 1971-12-29 | 1971-12-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4874241A true JPS4874241A (ja) | 1973-10-06 |
Family
ID=11501405
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP143772A Pending JPS4874241A (ja) | 1971-12-29 | 1971-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4874241A (ja) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5138977A (en) * | 1974-09-30 | 1976-03-31 | Fujitsu Ltd | Shotsukokunyoru chokusenjopataanno keiseihoho |
| JPS61240202A (ja) * | 1985-04-18 | 1986-10-25 | Nippon Telegr & Teleph Corp <Ntt> | 微細周期格子形成方法およびその装置 |
| JPH01182964A (ja) * | 1988-01-14 | 1989-07-20 | Teijin Ltd | 磁気ディスク装置 |
| JP2002214797A (ja) * | 2001-01-17 | 2002-07-31 | Sumitomo Heavy Ind Ltd | レーザ照射装置及び照射方法 |
| JP2006210754A (ja) * | 2005-01-31 | 2006-08-10 | Disco Abrasive Syst Ltd | 露光装置 |
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1971
- 1971-12-29 JP JP143772A patent/JPS4874241A/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5138977A (en) * | 1974-09-30 | 1976-03-31 | Fujitsu Ltd | Shotsukokunyoru chokusenjopataanno keiseihoho |
| JPS61240202A (ja) * | 1985-04-18 | 1986-10-25 | Nippon Telegr & Teleph Corp <Ntt> | 微細周期格子形成方法およびその装置 |
| JPH01182964A (ja) * | 1988-01-14 | 1989-07-20 | Teijin Ltd | 磁気ディスク装置 |
| JP2002214797A (ja) * | 2001-01-17 | 2002-07-31 | Sumitomo Heavy Ind Ltd | レーザ照射装置及び照射方法 |
| JP2006210754A (ja) * | 2005-01-31 | 2006-08-10 | Disco Abrasive Syst Ltd | 露光装置 |
| JP4527559B2 (ja) * | 2005-01-31 | 2010-08-18 | 株式会社ディスコ | 露光装置 |