JPS4872971A - - Google Patents

Info

Publication number
JPS4872971A
JPS4872971A JP234572A JP234572A JPS4872971A JP S4872971 A JPS4872971 A JP S4872971A JP 234572 A JP234572 A JP 234572A JP 234572 A JP234572 A JP 234572A JP S4872971 A JPS4872971 A JP S4872971A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP234572A
Other languages
Japanese (ja)
Other versions
JPS5547952B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP234572A priority Critical patent/JPS5547952B2/ja
Publication of JPS4872971A publication Critical patent/JPS4872971A/ja
Publication of JPS5547952B2 publication Critical patent/JPS5547952B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Drying Of Semiconductors (AREA)
JP234572A 1971-12-29 1971-12-29 Expired JPS5547952B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP234572A JPS5547952B2 (cs) 1971-12-29 1971-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP234572A JPS5547952B2 (cs) 1971-12-29 1971-12-29

Publications (2)

Publication Number Publication Date
JPS4872971A true JPS4872971A (cs) 1973-10-02
JPS5547952B2 JPS5547952B2 (cs) 1980-12-03

Family

ID=11526681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP234572A Expired JPS5547952B2 (cs) 1971-12-29 1971-12-29

Country Status (1)

Country Link
JP (1) JPS5547952B2 (cs)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52139366A (en) * 1976-05-14 1977-11-21 Deetaa Gen Corp Method of forming interface between metal and semiconductor
JPS5459081A (en) * 1977-10-20 1979-05-12 Toshiba Corp Surface treatment method for semiconductor element
JPS61284925A (ja) * 1985-06-10 1986-12-15 Sony Corp 半導体装置の製造方法
WO2002047142A1 (en) * 2000-12-05 2002-06-13 Tokyo Electron Limited Method and apparatus for treating article to be treated

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6355113B1 (en) 1991-12-02 2002-03-12 3M Innovative Properties Company Multiple solvent cleaning system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52139366A (en) * 1976-05-14 1977-11-21 Deetaa Gen Corp Method of forming interface between metal and semiconductor
JPS5459081A (en) * 1977-10-20 1979-05-12 Toshiba Corp Surface treatment method for semiconductor element
JPS61284925A (ja) * 1985-06-10 1986-12-15 Sony Corp 半導体装置の製造方法
WO2002047142A1 (en) * 2000-12-05 2002-06-13 Tokyo Electron Limited Method and apparatus for treating article to be treated
US7208428B2 (en) 2000-12-05 2007-04-24 Tokyo Electron Limited Method and apparatus for treating article to be treated

Also Published As

Publication number Publication date
JPS5547952B2 (cs) 1980-12-03

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