JPS4871783A - - Google Patents
Info
- Publication number
- JPS4871783A JPS4871783A JP165372A JP165372A JPS4871783A JP S4871783 A JPS4871783 A JP S4871783A JP 165372 A JP165372 A JP 165372A JP 165372 A JP165372 A JP 165372A JP S4871783 A JPS4871783 A JP S4871783A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP165372A JPS4871783A (ja) | 1971-12-29 | 1971-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP165372A JPS4871783A (ja) | 1971-12-29 | 1971-12-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4871783A true JPS4871783A (ja) | 1973-09-28 |
Family
ID=11507465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP165372A Pending JPS4871783A (ja) | 1971-12-29 | 1971-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4871783A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61111992A (ja) * | 1984-11-05 | 1986-05-30 | Rohm Co Ltd | 減圧気相成長装置 |
| JPS62146265A (ja) * | 1985-12-19 | 1987-06-30 | Matsushita Electric Ind Co Ltd | 気相化学蒸着装置 |
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1971
- 1971-12-29 JP JP165372A patent/JPS4871783A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61111992A (ja) * | 1984-11-05 | 1986-05-30 | Rohm Co Ltd | 減圧気相成長装置 |
| JPH0336794B2 (ja) * | 1984-11-05 | 1991-06-03 | Rohm Kk | |
| JPS62146265A (ja) * | 1985-12-19 | 1987-06-30 | Matsushita Electric Ind Co Ltd | 気相化学蒸着装置 |
| JPH0548307B2 (ja) * | 1985-12-19 | 1993-07-21 | Matsushita Electric Ind Co Ltd |