JPS4871191A - - Google Patents

Info

Publication number
JPS4871191A
JPS4871191A JP258172A JP258172A JPS4871191A JP S4871191 A JPS4871191 A JP S4871191A JP 258172 A JP258172 A JP 258172A JP 258172 A JP258172 A JP 258172A JP S4871191 A JPS4871191 A JP S4871191A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP258172A
Other languages
Japanese (ja)
Other versions
JPS5121751B2 (nl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47002581A priority Critical patent/JPS5121751B2/ja
Publication of JPS4871191A publication Critical patent/JPS4871191A/ja
Publication of JPS5121751B2 publication Critical patent/JPS5121751B2/ja
Expired legal-status Critical Current

Links

JP47002581A 1971-12-24 1971-12-24 Expired JPS5121751B2 (nl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47002581A JPS5121751B2 (nl) 1971-12-24 1971-12-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47002581A JPS5121751B2 (nl) 1971-12-24 1971-12-24

Publications (2)

Publication Number Publication Date
JPS4871191A true JPS4871191A (nl) 1973-09-26
JPS5121751B2 JPS5121751B2 (nl) 1976-07-05

Family

ID=11533326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47002581A Expired JPS5121751B2 (nl) 1971-12-24 1971-12-24

Country Status (1)

Country Link
JP (1) JPS5121751B2 (nl)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50154075A (nl) * 1974-05-31 1975-12-11
JPS51129183A (en) * 1975-05-02 1976-11-10 Mitsubishi Electric Corp Manufacturing method of semiconductor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3475234A (en) * 1967-03-27 1969-10-28 Bell Telephone Labor Inc Method for making mis structures

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3475234A (en) * 1967-03-27 1969-10-28 Bell Telephone Labor Inc Method for making mis structures

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50154075A (nl) * 1974-05-31 1975-12-11
JPS51129183A (en) * 1975-05-02 1976-11-10 Mitsubishi Electric Corp Manufacturing method of semiconductor

Also Published As

Publication number Publication date
JPS5121751B2 (nl) 1976-07-05

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