JPS4870481A - - Google Patents
Info
- Publication number
- JPS4870481A JPS4870481A JP51672A JP51672A JPS4870481A JP S4870481 A JPS4870481 A JP S4870481A JP 51672 A JP51672 A JP 51672A JP 51672 A JP51672 A JP 51672A JP S4870481 A JPS4870481 A JP S4870481A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Formation Of Insulating Films (AREA)
- Bipolar Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51672A JPS529349B2 (en) | 1971-12-23 | 1971-12-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51672A JPS529349B2 (en) | 1971-12-23 | 1971-12-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4870481A true JPS4870481A (en) | 1973-09-25 |
JPS529349B2 JPS529349B2 (en) | 1977-03-15 |
Family
ID=11475922
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51672A Expired JPS529349B2 (en) | 1971-12-23 | 1971-12-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS529349B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59227128A (en) * | 1983-06-08 | 1984-12-20 | Hitachi Ltd | Oxidation method for semiconductor substrate |
-
1971
- 1971-12-23 JP JP51672A patent/JPS529349B2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59227128A (en) * | 1983-06-08 | 1984-12-20 | Hitachi Ltd | Oxidation method for semiconductor substrate |
JPH0223023B2 (en) * | 1983-06-08 | 1990-05-22 | Hitachi Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPS529349B2 (en) | 1977-03-15 |