JPS4870481A - - Google Patents

Info

Publication number
JPS4870481A
JPS4870481A JP51672A JP51672A JPS4870481A JP S4870481 A JPS4870481 A JP S4870481A JP 51672 A JP51672 A JP 51672A JP 51672 A JP51672 A JP 51672A JP S4870481 A JPS4870481 A JP S4870481A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP51672A
Other languages
Japanese (ja)
Other versions
JPS529349B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP51672A priority Critical patent/JPS529349B2/ja
Publication of JPS4870481A publication Critical patent/JPS4870481A/ja
Publication of JPS529349B2 publication Critical patent/JPS529349B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Bipolar Transistors (AREA)
JP51672A 1971-12-23 1971-12-23 Expired JPS529349B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51672A JPS529349B2 (en) 1971-12-23 1971-12-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51672A JPS529349B2 (en) 1971-12-23 1971-12-23

Publications (2)

Publication Number Publication Date
JPS4870481A true JPS4870481A (en) 1973-09-25
JPS529349B2 JPS529349B2 (en) 1977-03-15

Family

ID=11475922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51672A Expired JPS529349B2 (en) 1971-12-23 1971-12-23

Country Status (1)

Country Link
JP (1) JPS529349B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59227128A (en) * 1983-06-08 1984-12-20 Hitachi Ltd Oxidation method for semiconductor substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59227128A (en) * 1983-06-08 1984-12-20 Hitachi Ltd Oxidation method for semiconductor substrate
JPH0223023B2 (en) * 1983-06-08 1990-05-22 Hitachi Ltd

Also Published As

Publication number Publication date
JPS529349B2 (en) 1977-03-15

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