JPS4865271A - - Google Patents

Info

Publication number
JPS4865271A
JPS4865271A JP10018971A JP10018971A JPS4865271A JP S4865271 A JPS4865271 A JP S4865271A JP 10018971 A JP10018971 A JP 10018971A JP 10018971 A JP10018971 A JP 10018971A JP S4865271 A JPS4865271 A JP S4865271A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10018971A
Other languages
Japanese (ja)
Other versions
JPS5139836B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10018971A priority Critical patent/JPS5139836B2/ja
Publication of JPS4865271A publication Critical patent/JPS4865271A/ja
Publication of JPS5139836B2 publication Critical patent/JPS5139836B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP10018971A 1971-12-13 1971-12-13 Expired JPS5139836B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10018971A JPS5139836B2 (en) 1971-12-13 1971-12-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10018971A JPS5139836B2 (en) 1971-12-13 1971-12-13

Publications (2)

Publication Number Publication Date
JPS4865271A true JPS4865271A (en) 1973-09-08
JPS5139836B2 JPS5139836B2 (en) 1976-10-29

Family

ID=14267339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10018971A Expired JPS5139836B2 (en) 1971-12-13 1971-12-13

Country Status (1)

Country Link
JP (1) JPS5139836B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50159567A (en) * 1974-06-14 1975-12-24
JPS58103534A (en) * 1981-12-16 1983-06-20 Toshiba Corp Vacuum deposition apparatus
JPS5941837A (en) * 1982-08-31 1984-03-08 Mitsubishi Electric Corp Applying method of photo-resist
JPS60180144A (en) * 1984-02-27 1985-09-13 Nec Kansai Ltd Manufacture of semiconductor element
JPH0661601A (en) * 1992-06-04 1994-03-04 Internatl Business Mach Corp <Ibm> Metallized layer and its formation method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50159567A (en) * 1974-06-14 1975-12-24
JPS58103534A (en) * 1981-12-16 1983-06-20 Toshiba Corp Vacuum deposition apparatus
JPS5941837A (en) * 1982-08-31 1984-03-08 Mitsubishi Electric Corp Applying method of photo-resist
JPS60180144A (en) * 1984-02-27 1985-09-13 Nec Kansai Ltd Manufacture of semiconductor element
JPH0584063B2 (en) * 1984-02-27 1993-11-30 Kansai Nippon Electric
JPH0661601A (en) * 1992-06-04 1994-03-04 Internatl Business Mach Corp <Ibm> Metallized layer and its formation method

Also Published As

Publication number Publication date
JPS5139836B2 (en) 1976-10-29

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