JPS4863046U - - Google Patents
Info
- Publication number
- JPS4863046U JPS4863046U JP10715971U JP10715971U JPS4863046U JP S4863046 U JPS4863046 U JP S4863046U JP 10715971 U JP10715971 U JP 10715971U JP 10715971 U JP10715971 U JP 10715971U JP S4863046 U JPS4863046 U JP S4863046U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10715971U JPS4863046U (enrdf_load_stackoverflow) | 1971-11-16 | 1971-11-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10715971U JPS4863046U (enrdf_load_stackoverflow) | 1971-11-16 | 1971-11-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4863046U true JPS4863046U (enrdf_load_stackoverflow) | 1973-08-10 |
Family
ID=28019767
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10715971U Pending JPS4863046U (enrdf_load_stackoverflow) | 1971-11-16 | 1971-11-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4863046U (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5645024A (en) * | 1979-09-21 | 1981-04-24 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Lithography apparatus |
JPS57183033A (en) * | 1981-05-06 | 1982-11-11 | Toshiba Corp | Method for wafer exposure and device thereof |
JPS63288014A (ja) * | 1988-04-22 | 1988-11-25 | Canon Inc | 焼付け装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2887935A (en) * | 1954-02-11 | 1959-05-26 | Perkin Elmer Corp | Optical image director |
US2887939A (en) * | 1953-11-13 | 1959-05-26 | Hans Deckel | Photographic exposure controlling apparatus |
US3422442A (en) * | 1966-01-12 | 1969-01-14 | Us Army | Micro-electronic form masking system |
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1971
- 1971-11-16 JP JP10715971U patent/JPS4863046U/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2887939A (en) * | 1953-11-13 | 1959-05-26 | Hans Deckel | Photographic exposure controlling apparatus |
US2887935A (en) * | 1954-02-11 | 1959-05-26 | Perkin Elmer Corp | Optical image director |
US3422442A (en) * | 1966-01-12 | 1969-01-14 | Us Army | Micro-electronic form masking system |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5645024A (en) * | 1979-09-21 | 1981-04-24 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Lithography apparatus |
JPS57183033A (en) * | 1981-05-06 | 1982-11-11 | Toshiba Corp | Method for wafer exposure and device thereof |
JPS63288014A (ja) * | 1988-04-22 | 1988-11-25 | Canon Inc | 焼付け装置 |