JPS4862376A - - Google Patents

Info

Publication number
JPS4862376A
JPS4862376A JP47114635A JP11463572A JPS4862376A JP S4862376 A JPS4862376 A JP S4862376A JP 47114635 A JP47114635 A JP 47114635A JP 11463572 A JP11463572 A JP 11463572A JP S4862376 A JPS4862376 A JP S4862376A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP47114635A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4862376A publication Critical patent/JPS4862376A/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08Deviation, concentration or focusing of the beam by electric or magnetic means
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08Deviation, concentration or focusing of the beam by electric or magnetic means
    • G21K1/093Deviation, concentration or focusing of the beam by electric or magnetic means by magnetic means

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Particle Accelerators (AREA)
JP47114635A 1971-11-15 1972-11-15 Pending JPS4862376A (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US19859971A 1971-11-15 1971-11-15

Publications (1)

Publication Number Publication Date
JPS4862376A true JPS4862376A (nl) 1973-08-31

Family

ID=22734033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47114635A Pending JPS4862376A (nl) 1971-11-15 1972-11-15

Country Status (13)

Country Link
US (1) US3748612A (nl)
JP (1) JPS4862376A (nl)
AR (1) AR192493A1 (nl)
BE (1) BE791387A (nl)
CA (1) CA980023A (nl)
DE (1) DE2255273C2 (nl)
DK (1) DK142799B (nl)
FR (1) FR2160419B1 (nl)
GB (1) GB1388169A (nl)
IT (1) IT973529B (nl)
NL (1) NL152399B (nl)
SE (1) SE381131B (nl)
ZA (1) ZA727371B (nl)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3152735A1 (de) * 1981-02-23 1983-02-24 Oleg Aleksandrovic Gusev Einrichtung zur bestrahlung von objekten mit elektronen
FR2510340A1 (fr) * 1981-07-21 1983-01-28 Gusev Oleg Dispositif pour l'irradiation d'objets par les electrons
GB2157069A (en) * 1984-04-02 1985-10-16 Philips Electronic Associated Step and repeat electron image projector
US6617586B2 (en) * 2002-01-18 2003-09-09 Scandinova Ab Beam delivery system
US6933507B2 (en) * 2002-07-17 2005-08-23 Kenneth H. Purser Controlling the characteristics of implanter ion-beams
US8604443B2 (en) * 2009-11-13 2013-12-10 Varian Semiconductor Equipment Associates, Inc. System and method for manipulating an ion beam
CN105097062A (zh) * 2015-09-11 2015-11-25 中广核达胜加速器技术有限公司 一种用于提高能量利用率的加速器扫描盒

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR847896A (fr) * 1937-12-23 1939-10-18 Telefunken Gmbh Système déflecteur de rayons cathodiques
NL249741A (nl) * 1959-03-23
US3469139A (en) * 1968-02-27 1969-09-23 Ford Motor Co Apparatus for electron beam control
US3541328A (en) * 1969-03-12 1970-11-17 Deuteron Inc Magnetic spectrograph having means for correcting for aberrations in two mutually perpendicular directions

Also Published As

Publication number Publication date
GB1388169A (en) 1975-03-26
ZA727371B (en) 1973-06-27
CA980023A (en) 1975-12-16
NL152399B (nl) 1977-02-15
DK142799B (da) 1981-01-26
DE2255273A1 (de) 1973-05-24
DE2255273C2 (de) 1983-06-01
BE791387A (fr) 1973-03-01
NL7215047A (nl) 1973-05-17
AU4798672A (en) 1973-10-04
AR192493A1 (es) 1973-02-21
US3748612A (en) 1973-07-24
FR2160419B1 (nl) 1976-04-23
SE381131B (sv) 1975-11-24
DK142799C (nl) 1981-08-24
IT973529B (it) 1974-06-10
FR2160419A1 (nl) 1973-06-29

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