BE791387A - Etrier de reglage de deviation d'un faisceau de particules chargees - Google Patents

Etrier de reglage de deviation d'un faisceau de particules chargees

Info

Publication number
BE791387A
BE791387A BE791387DA BE791387A BE 791387 A BE791387 A BE 791387A BE 791387D A BE791387D A BE 791387DA BE 791387 A BE791387 A BE 791387A
Authority
BE
Belgium
Prior art keywords
caliper
particle beam
deviation adjustment
loaded particle
loaded
Prior art date
Application number
Other languages
English (en)
Inventor
Z Hashmi
D H Mcnitt
Original Assignee
Ford Motor Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication date
Publication of BE791387A publication Critical patent/BE791387A/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
    • G21K1/093—Deviation, concentration or focusing of the beam by electric or magnetic means by magnetic means

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Particle Accelerators (AREA)
BE791387D 1971-11-15 Etrier de reglage de deviation d'un faisceau de particules chargees BE791387A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US19859971A 1971-11-15 1971-11-15

Publications (1)

Publication Number Publication Date
BE791387A true BE791387A (fr) 1973-03-01

Family

ID=22734033

Family Applications (1)

Application Number Title Priority Date Filing Date
BE791387D BE791387A (fr) 1971-11-15 Etrier de reglage de deviation d'un faisceau de particules chargees

Country Status (13)

Country Link
US (1) US3748612A (fr)
JP (1) JPS4862376A (fr)
AR (1) AR192493A1 (fr)
BE (1) BE791387A (fr)
CA (1) CA980023A (fr)
DE (1) DE2255273C2 (fr)
DK (1) DK142799B (fr)
FR (1) FR2160419B1 (fr)
GB (1) GB1388169A (fr)
IT (1) IT973529B (fr)
NL (1) NL152399B (fr)
SE (1) SE381131B (fr)
ZA (1) ZA727371B (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3152735A1 (de) * 1981-02-23 1983-02-24 Oleg Aleksandrovic Gusev Einrichtung zur bestrahlung von objekten mit elektronen
FR2510340A1 (fr) * 1981-07-21 1983-01-28 Gusev Oleg Dispositif pour l'irradiation d'objets par les electrons
GB2157069A (en) * 1984-04-02 1985-10-16 Philips Electronic Associated Step and repeat electron image projector
US6617586B2 (en) * 2002-01-18 2003-09-09 Scandinova Ab Beam delivery system
US6933507B2 (en) * 2002-07-17 2005-08-23 Kenneth H. Purser Controlling the characteristics of implanter ion-beams
US8604443B2 (en) * 2009-11-13 2013-12-10 Varian Semiconductor Equipment Associates, Inc. System and method for manipulating an ion beam
CN105097062A (zh) * 2015-09-11 2015-11-25 中广核达胜加速器技术有限公司 一种用于提高能量利用率的加速器扫描盒

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR847896A (fr) * 1937-12-23 1939-10-18 Telefunken Gmbh Système déflecteur de rayons cathodiques
NL249741A (fr) * 1959-03-23
US3469139A (en) * 1968-02-27 1969-09-23 Ford Motor Co Apparatus for electron beam control
US3541328A (en) * 1969-03-12 1970-11-17 Deuteron Inc Magnetic spectrograph having means for correcting for aberrations in two mutually perpendicular directions

Also Published As

Publication number Publication date
SE381131B (sv) 1975-11-24
DE2255273A1 (de) 1973-05-24
AU4798672A (en) 1973-10-04
JPS4862376A (fr) 1973-08-31
NL152399B (nl) 1977-02-15
DE2255273C2 (de) 1983-06-01
CA980023A (en) 1975-12-16
NL7215047A (fr) 1973-05-17
IT973529B (it) 1974-06-10
FR2160419A1 (fr) 1973-06-29
DK142799B (da) 1981-01-26
ZA727371B (en) 1973-06-27
DK142799C (fr) 1981-08-24
GB1388169A (en) 1975-03-26
US3748612A (en) 1973-07-24
AR192493A1 (es) 1973-02-21
FR2160419B1 (fr) 1976-04-23

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