JPS4861068A - - Google Patents
Info
- Publication number
- JPS4861068A JPS4861068A JP10330572A JP10330572A JPS4861068A JP S4861068 A JPS4861068 A JP S4861068A JP 10330572 A JP10330572 A JP 10330572A JP 10330572 A JP10330572 A JP 10330572A JP S4861068 A JPS4861068 A JP S4861068A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/70—Arrangements for deflecting ray or beam
- H01J29/701—Systems for correcting deviation or convergence of a plurality of beams by means of magnetic fields at least
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/70—Arrangements for deflecting ray or beam
- H01J29/72—Arrangements for deflecting ray or beam along one straight line or along two perpendicular straight lines
- H01J29/76—Deflecting by magnetic fields only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1472—Deflecting along given lines
- H01J37/1474—Scanning means
- H01J37/1475—Scanning means magnetic
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Details Of Television Scanning (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US20244071A | 1971-11-26 | 1971-11-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4861068A true JPS4861068A (de) | 1973-08-27 |
| JPS551669B2 JPS551669B2 (de) | 1980-01-16 |
Family
ID=22749879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10330572A Expired JPS551669B2 (de) | 1971-11-26 | 1972-10-17 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS551669B2 (de) |
| DE (1) | DE2255507C2 (de) |
| FR (1) | FR2160856B1 (de) |
| GB (1) | GB1372930A (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52128054A (en) * | 1976-04-20 | 1977-10-27 | Rikagaku Kenkyusho | Electromagnetic deflecting coil |
| JPS5788659A (en) * | 1980-11-21 | 1982-06-02 | Jeol Ltd | Electron ray device |
-
1972
- 1972-09-29 GB GB4500472A patent/GB1372930A/en not_active Expired
- 1972-10-17 JP JP10330572A patent/JPS551669B2/ja not_active Expired
- 1972-11-08 FR FR7240415A patent/FR2160856B1/fr not_active Expired
- 1972-11-13 DE DE19722255507 patent/DE2255507C2/de not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52128054A (en) * | 1976-04-20 | 1977-10-27 | Rikagaku Kenkyusho | Electromagnetic deflecting coil |
| JPS5788659A (en) * | 1980-11-21 | 1982-06-02 | Jeol Ltd | Electron ray device |
| JPS6255263B2 (de) * | 1980-11-21 | 1987-11-19 | Nippon Electron Optics Lab |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1372930A (en) | 1974-11-06 |
| FR2160856A1 (de) | 1973-07-06 |
| DE2255507C2 (de) | 1983-01-20 |
| FR2160856B1 (de) | 1976-06-04 |
| JPS551669B2 (de) | 1980-01-16 |
| DE2255507A1 (de) | 1973-05-30 |