FR2160856A1 - - Google Patents

Info

Publication number
FR2160856A1
FR2160856A1 FR7240415A FR7240415A FR2160856A1 FR 2160856 A1 FR2160856 A1 FR 2160856A1 FR 7240415 A FR7240415 A FR 7240415A FR 7240415 A FR7240415 A FR 7240415A FR 2160856 A1 FR2160856 A1 FR 2160856A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7240415A
Other languages
French (fr)
Other versions
FR2160856B1 (de
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2160856A1 publication Critical patent/FR2160856A1/fr
Application granted granted Critical
Publication of FR2160856B1 publication Critical patent/FR2160856B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/70—Arrangements for deflecting ray or beam
    • H01J29/701—Systems for correcting deviation or convergence of a plurality of beams by means of magnetic fields at least
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/70—Arrangements for deflecting ray or beam
    • H01J29/72—Arrangements for deflecting ray or beam along one straight line or along two perpendicular straight lines
    • H01J29/76—Deflecting by magnetic fields only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H01J37/1475—Scanning means magnetic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Details Of Television Scanning (AREA)
FR7240415A 1971-11-26 1972-11-08 Expired FR2160856B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US20244071A 1971-11-26 1971-11-26

Publications (2)

Publication Number Publication Date
FR2160856A1 true FR2160856A1 (de) 1973-07-06
FR2160856B1 FR2160856B1 (de) 1976-06-04

Family

ID=22749879

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7240415A Expired FR2160856B1 (de) 1971-11-26 1972-11-08

Country Status (4)

Country Link
JP (1) JPS551669B2 (de)
DE (1) DE2255507C2 (de)
FR (1) FR2160856B1 (de)
GB (1) GB1372930A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2494904A1 (fr) * 1980-11-21 1982-05-28 Jeol Ltd Dispositif a faisceau d'electrons pour microscopes electroniques a balayage

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52128054A (en) * 1976-04-20 1977-10-27 Rikagaku Kenkyusho Electromagnetic deflecting coil

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
REVUE BRITANNIQUE THE PROCEEDINGS OF THE INSTITUTION OF ELECTRICAL ENGINEERS, VOL. 99, NUMERO 20, PAR IIIA, 1952, PAGES 729-746, ARTICLE DE M.S.RICHARDS "AN INDUSTRIAL INSTRUMENT FOR THE OBSERVATION OF VERY-HIGH SPEED PHENOMENA.") *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2494904A1 (fr) * 1980-11-21 1982-05-28 Jeol Ltd Dispositif a faisceau d'electrons pour microscopes electroniques a balayage

Also Published As

Publication number Publication date
JPS4861068A (de) 1973-08-27
GB1372930A (en) 1974-11-06
DE2255507C2 (de) 1983-01-20
FR2160856B1 (de) 1976-06-04
JPS551669B2 (de) 1980-01-16
DE2255507A1 (de) 1973-05-30

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Legal Events

Date Code Title Description
ST Notification of lapse