JPS4860881A - - Google Patents

Info

Publication number
JPS4860881A
JPS4860881A JP46096086A JP9608671A JPS4860881A JP S4860881 A JPS4860881 A JP S4860881A JP 46096086 A JP46096086 A JP 46096086A JP 9608671 A JP9608671 A JP 9608671A JP S4860881 A JPS4860881 A JP S4860881A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP46096086A
Other languages
Japanese (ja)
Other versions
JPS5141515B2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP46096086A priority Critical patent/JPS5141515B2/ja
Publication of JPS4860881A publication Critical patent/JPS4860881A/ja
Publication of JPS5141515B2 publication Critical patent/JPS5141515B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
JP46096086A 1971-11-29 1971-11-29 Expired JPS5141515B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP46096086A JPS5141515B2 (enExample) 1971-11-29 1971-11-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP46096086A JPS5141515B2 (enExample) 1971-11-29 1971-11-29

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP51002657A Division JPS597230B2 (ja) 1976-01-12 1976-01-12 絶縁ゲイト型電界効界半導体装置およびその作製方法

Publications (2)

Publication Number Publication Date
JPS4860881A true JPS4860881A (enExample) 1973-08-25
JPS5141515B2 JPS5141515B2 (enExample) 1976-11-10

Family

ID=14155574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP46096086A Expired JPS5141515B2 (enExample) 1971-11-29 1971-11-29

Country Status (1)

Country Link
JP (1) JPS5141515B2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4944677A (enExample) * 1972-05-31 1974-04-26
JPH0355880A (ja) * 1989-07-25 1991-03-11 Toshiba Corp 不揮発性半導体記憶装置及びその製造方法
US5668028A (en) * 1993-11-30 1997-09-16 Sgs-Thomson Microelectronics, Inc. Method of depositing thin nitride layer on gate oxide dielectric

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4944677A (enExample) * 1972-05-31 1974-04-26
JPH0355880A (ja) * 1989-07-25 1991-03-11 Toshiba Corp 不揮発性半導体記憶装置及びその製造方法
US5668028A (en) * 1993-11-30 1997-09-16 Sgs-Thomson Microelectronics, Inc. Method of depositing thin nitride layer on gate oxide dielectric
US5710453A (en) * 1993-11-30 1998-01-20 Sgs-Thomson Microelectronics, Inc. Transistor structure and method for making same

Also Published As

Publication number Publication date
JPS5141515B2 (enExample) 1976-11-10

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