JPS4859833A - - Google Patents
Info
- Publication number
- JPS4859833A JPS4859833A JP46093709A JP9370971A JPS4859833A JP S4859833 A JPS4859833 A JP S4859833A JP 46093709 A JP46093709 A JP 46093709A JP 9370971 A JP9370971 A JP 9370971A JP S4859833 A JPS4859833 A JP S4859833A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/24—Optical objectives specially designed for the purposes specified below for reproducing or copying at short object distances
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Lenses (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9370971A JPS5510884B2 (fr) | 1971-11-24 | 1971-11-24 | |
| DE19722257473 DE2257473C3 (de) | 1971-11-24 | 1972-11-23 | Projektionsobjektiv für das Drucken von Maskenmustern |
| US498286A US3897138A (en) | 1971-11-24 | 1974-08-16 | Projection lens for mask pattern printing |
| US05/678,542 USRE29856E (en) | 1971-11-24 | 1976-04-20 | Projection lens for mask pattern printing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9370971A JPS5510884B2 (fr) | 1971-11-24 | 1971-11-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4859833A true JPS4859833A (fr) | 1973-08-22 |
| JPS5510884B2 JPS5510884B2 (fr) | 1980-03-19 |
Family
ID=14089927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9370971A Expired JPS5510884B2 (fr) | 1971-11-24 | 1971-11-24 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS5510884B2 (fr) |
| DE (1) | DE2257473C3 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0253016A (ja) * | 1988-08-17 | 1990-02-22 | Sumitomo Heavy Ind Ltd | 多焦点対物レンズ系 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5885073U (ja) * | 1981-12-04 | 1983-06-09 | 文化シヤツタ−株式会社 | 開閉装置 |
| JPS58151293U (ja) * | 1982-04-02 | 1983-10-11 | 東洋シャッター株式会社 | プリントしたスクリ−ンを備えたシヤツタ− |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE938335C (de) * | 1952-08-17 | 1956-01-26 | Zeiss Carl Fa | Anastigmatisches Objektiv |
| US3588228A (en) * | 1969-08-15 | 1971-06-28 | Ibm | Variable reduction lens system |
| US3685884A (en) * | 1971-01-29 | 1972-08-22 | Olympus Optical Co | 1 x objective for projection printing |
-
1971
- 1971-11-24 JP JP9370971A patent/JPS5510884B2/ja not_active Expired
-
1972
- 1972-11-23 DE DE19722257473 patent/DE2257473C3/de not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0253016A (ja) * | 1988-08-17 | 1990-02-22 | Sumitomo Heavy Ind Ltd | 多焦点対物レンズ系 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5510884B2 (fr) | 1980-03-19 |
| DE2257473C3 (de) | 1984-09-20 |
| DE2257473A1 (de) | 1973-05-30 |
| DE2257473B2 (de) | 1976-03-04 |