JPS4858771A - - Google Patents
Info
- Publication number
- JPS4858771A JPS4858771A JP9312171A JP9312171A JPS4858771A JP S4858771 A JPS4858771 A JP S4858771A JP 9312171 A JP9312171 A JP 9312171A JP 9312171 A JP9312171 A JP 9312171A JP S4858771 A JPS4858771 A JP S4858771A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Dicing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9312171A JPS4858771A (cs) | 1971-11-22 | 1971-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9312171A JPS4858771A (cs) | 1971-11-22 | 1971-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4858771A true JPS4858771A (cs) | 1973-08-17 |
Family
ID=14073674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9312171A Pending JPS4858771A (cs) | 1971-11-22 | 1971-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4858771A (cs) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4979684A (cs) * | 1972-12-07 | 1974-08-01 | ||
| JPS5421258A (en) * | 1977-07-19 | 1979-02-17 | Nec Home Electronics Ltd | Separation method for semiconductor element |
| JPS61148004A (ja) * | 1985-11-27 | 1986-07-05 | 株式会社日立製作所 | ダイシング装置 |
| JPH02229008A (ja) * | 1989-03-02 | 1990-09-11 | Fujitsu Ltd | セラミック基板切断時のチッピング防止法 |
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1971
- 1971-11-22 JP JP9312171A patent/JPS4858771A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4979684A (cs) * | 1972-12-07 | 1974-08-01 | ||
| JPS5421258A (en) * | 1977-07-19 | 1979-02-17 | Nec Home Electronics Ltd | Separation method for semiconductor element |
| JPS61148004A (ja) * | 1985-11-27 | 1986-07-05 | 株式会社日立製作所 | ダイシング装置 |
| JPH02229008A (ja) * | 1989-03-02 | 1990-09-11 | Fujitsu Ltd | セラミック基板切断時のチッピング防止法 |