JPS4856598A - - Google Patents

Info

Publication number
JPS4856598A
JPS4856598A JP9316971A JP9316971A JPS4856598A JP S4856598 A JPS4856598 A JP S4856598A JP 9316971 A JP9316971 A JP 9316971A JP 9316971 A JP9316971 A JP 9316971A JP S4856598 A JPS4856598 A JP S4856598A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9316971A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9316971A priority Critical patent/JPS4856598A/ja
Publication of JPS4856598A publication Critical patent/JPS4856598A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Drying Of Semiconductors (AREA)
JP9316971A 1971-11-22 1971-11-22 Pending JPS4856598A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9316971A JPS4856598A (enrdf_load_stackoverflow) 1971-11-22 1971-11-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9316971A JPS4856598A (enrdf_load_stackoverflow) 1971-11-22 1971-11-22

Publications (1)

Publication Number Publication Date
JPS4856598A true JPS4856598A (enrdf_load_stackoverflow) 1973-08-08

Family

ID=14075052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9316971A Pending JPS4856598A (enrdf_load_stackoverflow) 1971-11-22 1971-11-22

Country Status (1)

Country Link
JP (1) JPS4856598A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58101429A (ja) * 1981-12-12 1983-06-16 Semiconductor Res Found ドライエツチング方法
JPH01239846A (ja) * 1988-03-19 1989-09-25 Fujitsu Ltd 反応性ガスエッチング方法
US6599843B2 (en) * 2001-05-29 2003-07-29 Infineon Technologies Ag In-situ mask technique for producing III-V semiconductor components

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58101429A (ja) * 1981-12-12 1983-06-16 Semiconductor Res Found ドライエツチング方法
JPH01239846A (ja) * 1988-03-19 1989-09-25 Fujitsu Ltd 反応性ガスエッチング方法
US6599843B2 (en) * 2001-05-29 2003-07-29 Infineon Technologies Ag In-situ mask technique for producing III-V semiconductor components

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