JPS4856377A - - Google Patents

Info

Publication number
JPS4856377A
JPS4856377A JP46091514A JP9151471A JPS4856377A JP S4856377 A JPS4856377 A JP S4856377A JP 46091514 A JP46091514 A JP 46091514A JP 9151471 A JP9151471 A JP 9151471A JP S4856377 A JPS4856377 A JP S4856377A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP46091514A
Other languages
Japanese (ja)
Other versions
JPS547193B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9151471A priority Critical patent/JPS547193B2/ja
Publication of JPS4856377A publication Critical patent/JPS4856377A/ja
Publication of JPS547193B2 publication Critical patent/JPS547193B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Electron Beam Exposure (AREA)
JP9151471A 1971-11-17 1971-11-17 Expired JPS547193B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9151471A JPS547193B2 (cs) 1971-11-17 1971-11-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9151471A JPS547193B2 (cs) 1971-11-17 1971-11-17

Publications (2)

Publication Number Publication Date
JPS4856377A true JPS4856377A (cs) 1973-08-08
JPS547193B2 JPS547193B2 (cs) 1979-04-04

Family

ID=14028499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9151471A Expired JPS547193B2 (cs) 1971-11-17 1971-11-17

Country Status (1)

Country Link
JP (1) JPS547193B2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52145897A (en) * 1976-05-28 1977-12-05 Mitsubishi Electric Corp Positioning method for machining using ultra-fine electron beam
JPS5627927A (en) * 1979-08-14 1981-03-18 Toshiba Corp Location in electron beam injection

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52145897A (en) * 1976-05-28 1977-12-05 Mitsubishi Electric Corp Positioning method for machining using ultra-fine electron beam
JPS5627927A (en) * 1979-08-14 1981-03-18 Toshiba Corp Location in electron beam injection

Also Published As

Publication number Publication date
JPS547193B2 (cs) 1979-04-04

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