JPS4854873A - - Google Patents
Info
- Publication number
- JPS4854873A JPS4854873A JP46089013A JP8901371A JPS4854873A JP S4854873 A JPS4854873 A JP S4854873A JP 46089013 A JP46089013 A JP 46089013A JP 8901371 A JP8901371 A JP 8901371A JP S4854873 A JPS4854873 A JP S4854873A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8901371A JPS5423219B2 (https=) | 1971-11-10 | 1971-11-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8901371A JPS5423219B2 (https=) | 1971-11-10 | 1971-11-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4854873A true JPS4854873A (https=) | 1973-08-01 |
| JPS5423219B2 JPS5423219B2 (https=) | 1979-08-11 |
Family
ID=13959015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8901371A Expired JPS5423219B2 (https=) | 1971-11-10 | 1971-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5423219B2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54148483A (en) * | 1978-05-15 | 1979-11-20 | Nippon Telegr & Teleph Corp <Ntt> | Automatic detecting method for reference mark of exposure |
-
1971
- 1971-11-10 JP JP8901371A patent/JPS5423219B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54148483A (en) * | 1978-05-15 | 1979-11-20 | Nippon Telegr & Teleph Corp <Ntt> | Automatic detecting method for reference mark of exposure |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5423219B2 (https=) | 1979-08-11 |