JPS4850688A - - Google Patents
Info
- Publication number
- JPS4850688A JPS4850688A JP46084609A JP8460971A JPS4850688A JP S4850688 A JPS4850688 A JP S4850688A JP 46084609 A JP46084609 A JP 46084609A JP 8460971 A JP8460971 A JP 8460971A JP S4850688 A JPS4850688 A JP S4850688A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Lasers (AREA)
- Laser Beam Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46084609A JPS4850688A (fr) | 1971-10-25 | 1971-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46084609A JPS4850688A (fr) | 1971-10-25 | 1971-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4850688A true JPS4850688A (fr) | 1973-07-17 |
Family
ID=13835420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46084609A Pending JPS4850688A (fr) | 1971-10-25 | 1971-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4850688A (fr) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60213390A (ja) * | 1984-04-09 | 1985-10-25 | Amada Co Ltd | レ−ザ加工機 |
| JPS61255786A (ja) * | 1985-05-10 | 1986-11-13 | Toyoda Mach Works Ltd | レ−ザ加工装置 |
| JPS63503213A (ja) * | 1986-03-25 | 1988-11-24 | レーザー・ラブ・リミテッド | 工作ヘッド装置 |
| WO2007072837A1 (fr) * | 2005-12-20 | 2007-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Appareil et procede d'irradiation laser, et procede de fabrication d'un dispositif a semi-conducteur |
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1971
- 1971-10-25 JP JP46084609A patent/JPS4850688A/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60213390A (ja) * | 1984-04-09 | 1985-10-25 | Amada Co Ltd | レ−ザ加工機 |
| JPH055596B2 (fr) * | 1984-04-09 | 1993-01-22 | Amada Co Ltd | |
| JPS61255786A (ja) * | 1985-05-10 | 1986-11-13 | Toyoda Mach Works Ltd | レ−ザ加工装置 |
| JPS63503213A (ja) * | 1986-03-25 | 1988-11-24 | レーザー・ラブ・リミテッド | 工作ヘッド装置 |
| WO2007072837A1 (fr) * | 2005-12-20 | 2007-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Appareil et procede d'irradiation laser, et procede de fabrication d'un dispositif a semi-conducteur |
| US8525070B2 (en) | 2005-12-20 | 2013-09-03 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device |