JPS4841941A - - Google Patents
Info
- Publication number
- JPS4841941A JPS4841941A JP7711171A JP7711171A JPS4841941A JP S4841941 A JPS4841941 A JP S4841941A JP 7711171 A JP7711171 A JP 7711171A JP 7711171 A JP7711171 A JP 7711171A JP S4841941 A JPS4841941 A JP S4841941A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- ing And Chemical Polishing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7711171A JPS4841941A (de) | 1971-10-04 | 1971-10-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7711171A JPS4841941A (de) | 1971-10-04 | 1971-10-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4841941A true JPS4841941A (de) | 1973-06-19 |
Family
ID=13624662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7711171A Pending JPS4841941A (de) | 1971-10-04 | 1971-10-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4841941A (de) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5311953A (en) * | 1976-07-20 | 1978-02-02 | Asahi Denka Kogyo Kk | Method for filling joints |
| JPS5311845A (en) * | 1976-07-20 | 1978-02-02 | Matsushita Electric Ind Co Ltd | Minutely processing method |
| JPS56501144A (de) * | 1979-09-21 | 1981-08-13 | ||
| JPS57103317A (en) * | 1980-12-18 | 1982-06-26 | Fujitsu Ltd | Method for patterning |
| JPS636895A (ja) * | 1986-06-26 | 1988-01-12 | イビデン株式会社 | フオトソルダ−レジスト被膜の形成方法 |
| JPH02108056A (ja) * | 1988-10-17 | 1990-04-19 | Nec Corp | 半導体装置の製造方法 |
| JPH03222409A (ja) * | 1990-01-29 | 1991-10-01 | Nec Corp | 半導体装置の製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3488194A (en) * | 1966-06-09 | 1970-01-06 | Eastman Kodak Co | Photosensitive metal plate |
| DE1572153A1 (de) * | 1966-06-27 | 1970-01-08 | Du Pont | Fotopolymerisierbares Material |
-
1971
- 1971-10-04 JP JP7711171A patent/JPS4841941A/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3488194A (en) * | 1966-06-09 | 1970-01-06 | Eastman Kodak Co | Photosensitive metal plate |
| DE1572153A1 (de) * | 1966-06-27 | 1970-01-08 | Du Pont | Fotopolymerisierbares Material |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5311953A (en) * | 1976-07-20 | 1978-02-02 | Asahi Denka Kogyo Kk | Method for filling joints |
| JPS5311845A (en) * | 1976-07-20 | 1978-02-02 | Matsushita Electric Ind Co Ltd | Minutely processing method |
| JPS5914550B2 (ja) * | 1976-07-20 | 1984-04-05 | 松下電器産業株式会社 | 微細加工方法 |
| JPS6012380B2 (ja) * | 1976-07-20 | 1985-04-01 | 旭電化工業株式会社 | 目地充填法 |
| JPS56501144A (de) * | 1979-09-21 | 1981-08-13 | ||
| JPS57103317A (en) * | 1980-12-18 | 1982-06-26 | Fujitsu Ltd | Method for patterning |
| JPS636895A (ja) * | 1986-06-26 | 1988-01-12 | イビデン株式会社 | フオトソルダ−レジスト被膜の形成方法 |
| JPH0582077B2 (de) * | 1986-06-26 | 1993-11-17 | Ibiden Co Ltd | |
| JPH02108056A (ja) * | 1988-10-17 | 1990-04-19 | Nec Corp | 半導体装置の製造方法 |
| JPH03222409A (ja) * | 1990-01-29 | 1991-10-01 | Nec Corp | 半導体装置の製造方法 |