JPS4841670A - - Google Patents

Info

Publication number
JPS4841670A
JPS4841670A JP7563271A JP7563271A JPS4841670A JP S4841670 A JPS4841670 A JP S4841670A JP 7563271 A JP7563271 A JP 7563271A JP 7563271 A JP7563271 A JP 7563271A JP S4841670 A JPS4841670 A JP S4841670A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7563271A
Other languages
Japanese (ja)
Other versions
JPS53671B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7563271A priority Critical patent/JPS53671B2/ja
Publication of JPS4841670A publication Critical patent/JPS4841670A/ja
Publication of JPS53671B2 publication Critical patent/JPS53671B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP7563271A 1971-09-28 1971-09-28 Expired JPS53671B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7563271A JPS53671B2 (enrdf_load_stackoverflow) 1971-09-28 1971-09-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7563271A JPS53671B2 (enrdf_load_stackoverflow) 1971-09-28 1971-09-28

Publications (2)

Publication Number Publication Date
JPS4841670A true JPS4841670A (enrdf_load_stackoverflow) 1973-06-18
JPS53671B2 JPS53671B2 (enrdf_load_stackoverflow) 1978-01-11

Family

ID=13581803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7563271A Expired JPS53671B2 (enrdf_load_stackoverflow) 1971-09-28 1971-09-28

Country Status (1)

Country Link
JP (1) JPS53671B2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51134372U (enrdf_load_stackoverflow) * 1975-04-22 1976-10-29
JPS6165419A (ja) * 1984-09-07 1986-04-04 Tdk Corp 気相成長装置
JPH01302815A (ja) * 1988-05-31 1989-12-06 Shinetsu Sekiei Kk ウエハ熱処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51134372U (enrdf_load_stackoverflow) * 1975-04-22 1976-10-29
JPS6165419A (ja) * 1984-09-07 1986-04-04 Tdk Corp 気相成長装置
JPH01302815A (ja) * 1988-05-31 1989-12-06 Shinetsu Sekiei Kk ウエハ熱処理装置

Also Published As

Publication number Publication date
JPS53671B2 (enrdf_load_stackoverflow) 1978-01-11

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