JPS4836658U - - Google Patents
Info
- Publication number
- JPS4836658U JPS4836658U JP7999271U JP7999271U JPS4836658U JP S4836658 U JPS4836658 U JP S4836658U JP 7999271 U JP7999271 U JP 7999271U JP 7999271 U JP7999271 U JP 7999271U JP S4836658 U JPS4836658 U JP S4836658U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7999271U JPS4836658U (ja) | 1971-09-03 | 1971-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7999271U JPS4836658U (ja) | 1971-09-03 | 1971-09-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4836658U true JPS4836658U (ja) | 1973-05-02 |
Family
ID=27985420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7999271U Pending JPS4836658U (ja) | 1971-09-03 | 1971-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4836658U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015127043A (ja) * | 2013-11-28 | 2015-07-09 | 芝浦メカトロニクス株式会社 | 基板処理装置 |
-
1971
- 1971-09-03 JP JP7999271U patent/JPS4836658U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015127043A (ja) * | 2013-11-28 | 2015-07-09 | 芝浦メカトロニクス株式会社 | 基板処理装置 |
| TWI559432B (zh) * | 2013-11-28 | 2016-11-21 | Shibaura Mechatronics Corp | Substrate processing device |