JPS4834670A - - Google Patents
Info
- Publication number
- JPS4834670A JPS4834670A JP6939771A JP6939771A JPS4834670A JP S4834670 A JPS4834670 A JP S4834670A JP 6939771 A JP6939771 A JP 6939771A JP 6939771 A JP6939771 A JP 6939771A JP S4834670 A JPS4834670 A JP S4834670A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6939771A JPS4834670A (cs) | 1971-09-07 | 1971-09-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6939771A JPS4834670A (cs) | 1971-09-07 | 1971-09-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4834670A true JPS4834670A (cs) | 1973-05-21 |
Family
ID=13401415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6939771A Pending JPS4834670A (cs) | 1971-09-07 | 1971-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4834670A (cs) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51132762A (en) * | 1975-05-13 | 1976-11-18 | Nec Home Electronics Ltd | Heat-treatment method of semiconductor device |
| JPS5288468U (cs) * | 1975-12-26 | 1977-07-01 | ||
| JPS55148433A (en) * | 1979-05-08 | 1980-11-19 | Nec Corp | Manufacture of semiconductor device and device therefor |
| JPS6077971A (ja) * | 1983-10-06 | 1985-05-02 | Ulvac Corp | 化学反応を利用した縦型インラインプロセス装置 |
| JPS60148126A (ja) * | 1984-01-13 | 1985-08-05 | Toshiba Corp | 半導体素子の製造装置 |
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1971
- 1971-09-07 JP JP6939771A patent/JPS4834670A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51132762A (en) * | 1975-05-13 | 1976-11-18 | Nec Home Electronics Ltd | Heat-treatment method of semiconductor device |
| JPS5288468U (cs) * | 1975-12-26 | 1977-07-01 | ||
| JPS55148433A (en) * | 1979-05-08 | 1980-11-19 | Nec Corp | Manufacture of semiconductor device and device therefor |
| JPS6077971A (ja) * | 1983-10-06 | 1985-05-02 | Ulvac Corp | 化学反応を利用した縦型インラインプロセス装置 |
| JPS60148126A (ja) * | 1984-01-13 | 1985-08-05 | Toshiba Corp | 半導体素子の製造装置 |