JPS4831877A - - Google Patents
Info
- Publication number
- JPS4831877A JPS4831877A JP47081537A JP8153772A JPS4831877A JP S4831877 A JPS4831877 A JP S4831877A JP 47081537 A JP47081537 A JP 47081537A JP 8153772 A JP8153772 A JP 8153772A JP S4831877 A JPS4831877 A JP S4831877A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/34—Photo-emissive cathodes
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/20—Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/34—Photoemissive electrodes
- H01J2201/342—Cathodes
- H01J2201/3421—Composition of the emitting surface
- H01J2201/3425—Metals, metal alloys
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electron Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17199071A | 1971-08-16 | 1971-08-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4831877A true JPS4831877A (de) | 1973-04-26 |
Family
ID=22625914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47081537A Pending JPS4831877A (de) | 1971-08-16 | 1972-08-16 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS4831877A (de) |
| DE (1) | DE2236918C3 (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5428200A (en) * | 1977-11-24 | 1979-03-02 | Toshiba Corp | Coupon ticket handling system |
| JPS61123135A (ja) * | 1984-11-20 | 1986-06-11 | Fujitsu Ltd | 光電子像転写方法 |
-
1972
- 1972-07-27 DE DE2236918A patent/DE2236918C3/de not_active Expired
- 1972-08-16 JP JP47081537A patent/JPS4831877A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5428200A (en) * | 1977-11-24 | 1979-03-02 | Toshiba Corp | Coupon ticket handling system |
| JPS581836B2 (ja) * | 1977-11-24 | 1983-01-13 | 株式会社東芝 | 回数券処理装置 |
| JPS61123135A (ja) * | 1984-11-20 | 1986-06-11 | Fujitsu Ltd | 光電子像転写方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2236918A1 (de) | 1973-03-01 |
| DE2236918B2 (en) | 1974-11-21 |
| DE2236918C3 (de) | 1975-07-10 |