JPS4831507A - - Google Patents
Info
- Publication number
- JPS4831507A JPS4831507A JP6562971A JP6562971A JPS4831507A JP S4831507 A JPS4831507 A JP S4831507A JP 6562971 A JP6562971 A JP 6562971A JP 6562971 A JP6562971 A JP 6562971A JP S4831507 A JPS4831507 A JP S4831507A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Nozzles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6562971A JPS5027886B2 (https=) | 1971-08-26 | 1971-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6562971A JPS5027886B2 (https=) | 1971-08-26 | 1971-08-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4831507A true JPS4831507A (https=) | 1973-04-25 |
| JPS5027886B2 JPS5027886B2 (https=) | 1975-09-11 |
Family
ID=13292485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6562971A Expired JPS5027886B2 (https=) | 1971-08-26 | 1971-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5027886B2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53139972A (en) * | 1977-05-13 | 1978-12-06 | Matsushita Electric Ind Co Ltd | Production of semiconductor device |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5514748U (https=) * | 1978-07-14 | 1980-01-30 | ||
| JPS5777939U (https=) * | 1980-10-30 | 1982-05-14 | ||
| JPS62133147U (https=) * | 1986-02-07 | 1987-08-22 |
-
1971
- 1971-08-26 JP JP6562971A patent/JPS5027886B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53139972A (en) * | 1977-05-13 | 1978-12-06 | Matsushita Electric Ind Co Ltd | Production of semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5027886B2 (https=) | 1975-09-11 |