JPS4829998A - - Google Patents
Info
- Publication number
- JPS4829998A JPS4829998A JP8326172A JP8326172A JPS4829998A JP S4829998 A JPS4829998 A JP S4829998A JP 8326172 A JP8326172 A JP 8326172A JP 8326172 A JP8326172 A JP 8326172A JP S4829998 A JPS4829998 A JP S4829998A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19712142573 DE2142573A1 (de) | 1971-08-20 | 1971-08-20 | Korpuskularstrahlgeraet, insbesondere elektronenmikroskop |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4829998A true JPS4829998A (ja) | 1973-04-20 |
Family
ID=5817755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8326172A Pending JPS4829998A (ja) | 1971-08-20 | 1972-08-19 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS4829998A (ja) |
| DE (1) | DE2142573A1 (ja) |
| NL (1) | NL7209240A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6197105A (ja) * | 1984-10-17 | 1986-05-15 | Jgc Corp | 炭化水素の水蒸気改質法 |
-
1971
- 1971-08-20 DE DE19712142573 patent/DE2142573A1/de active Pending
-
1972
- 1972-06-30 NL NL7209240A patent/NL7209240A/xx unknown
- 1972-08-19 JP JP8326172A patent/JPS4829998A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6197105A (ja) * | 1984-10-17 | 1986-05-15 | Jgc Corp | 炭化水素の水蒸気改質法 |
Also Published As
| Publication number | Publication date |
|---|---|
| NL7209240A (ja) | 1973-02-22 |
| DE2142573A1 (de) | 1973-02-22 |