JPS4822902B1 - - Google Patents
Info
- Publication number
- JPS4822902B1 JPS4822902B1 JP45113203A JP11320370A JPS4822902B1 JP S4822902 B1 JPS4822902 B1 JP S4822902B1 JP 45113203 A JP45113203 A JP 45113203A JP 11320370 A JP11320370 A JP 11320370A JP S4822902 B1 JPS4822902 B1 JP S4822902B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/08—Reaction chambers; Selection of materials therefor
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4587—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially vertically
- C23C16/4588—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially vertically the substrate being rotated
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US34470A | 1970-01-02 | 1970-01-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4822902B1 true JPS4822902B1 (en) | 1973-07-10 |
Family
ID=21691104
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP45113203A Pending JPS4822902B1 (en) | 1970-01-02 | 1970-12-18 |
Country Status (7)
Country | Link |
---|---|
US (1) | US3603284A (en) |
JP (1) | JPS4822902B1 (en) |
CA (1) | CA922502A (en) |
CH (1) | CH516342A (en) |
DE (1) | DE2049229A1 (en) |
FR (1) | FR2075031A5 (en) |
GB (1) | GB1328838A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5517018Y2 (en) * | 1974-03-20 | 1980-04-21 |
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3865072A (en) * | 1973-10-18 | 1975-02-11 | Hls Ind | Apparatus for chemically depositing epitaxial layers on semiconductor substrates |
DE2943634C2 (en) * | 1979-10-29 | 1983-09-29 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Epitaxial reactor |
US4322592A (en) * | 1980-08-22 | 1982-03-30 | Rca Corporation | Susceptor for heating semiconductor substrates |
US4365588A (en) * | 1981-03-13 | 1982-12-28 | Rca Corporation | Fixture for VPE reactor |
US4501766A (en) * | 1982-02-03 | 1985-02-26 | Tokyo Shibaura Denki Kabushiki Kaisha | Film depositing apparatus and a film depositing method |
US4496828A (en) * | 1983-07-08 | 1985-01-29 | Ultra Carbon Corporation | Susceptor assembly |
US4597986A (en) * | 1984-07-31 | 1986-07-01 | Hughes Aircraft Company | Method for photochemical vapor deposition |
US4615294A (en) * | 1984-07-31 | 1986-10-07 | Hughes Aircraft Company | Barrel reactor and method for photochemical vapor deposition |
US4638762A (en) * | 1985-08-30 | 1987-01-27 | At&T Technologies, Inc. | Chemical vapor deposition method and apparatus |
GB8620273D0 (en) * | 1986-08-20 | 1986-10-01 | Gen Electric Co Plc | Deposition of thin films |
JPS63186875A (en) * | 1987-01-29 | 1988-08-02 | Tadahiro Omi | Surface reaction film forming device |
DE3707672A1 (en) * | 1987-03-10 | 1988-09-22 | Sitesa Sa | EPITAXY SYSTEM |
US5002011A (en) * | 1987-04-14 | 1991-03-26 | Kabushiki Kaisha Toshiba | Vapor deposition apparatus |
US4997677A (en) * | 1987-08-31 | 1991-03-05 | Massachusetts Institute Of Technology | Vapor phase reactor for making multilayer structures |
KR890008922A (en) * | 1987-11-21 | 1989-07-13 | 후세 노보루 | Heat treatment device |
DE3816788A1 (en) * | 1988-05-17 | 1989-11-23 | Siemens Ag | Epitaxy apparatus |
US5821175A (en) * | 1988-07-08 | 1998-10-13 | Cauldron Limited Partnership | Removal of surface contaminants by irradiation using various methods to achieve desired inert gas flow over treated surface |
WO1990010092A1 (en) * | 1989-02-24 | 1990-09-07 | Massachusetts Institute Of Technology | A modified stagnation flow apparatus for chemical vapor deposition providing excellent control of the deposition |
JP2888253B2 (en) * | 1989-07-20 | 1999-05-10 | 富士通株式会社 | Chemical vapor deposition and apparatus for its implementation |
FR2670507B1 (en) * | 1990-12-18 | 1993-12-31 | Propulsion Ste Europeenne | CHEMICAL STEAM INFILTRATION PROCESS. |
US5286519A (en) * | 1991-06-25 | 1994-02-15 | Lsi Logic Corporation | Fluid dispersion head |
US5268034A (en) * | 1991-06-25 | 1993-12-07 | Lsi Logic Corporation | Fluid dispersion head for CVD appratus |
KR100291108B1 (en) * | 1993-03-17 | 2001-06-01 | 히가시 데쓰로 | Plasma processing systems |
US5522933A (en) * | 1994-05-19 | 1996-06-04 | Geller; Anthony S. | Particle-free microchip processing |
US6518494B1 (en) * | 1995-08-22 | 2003-02-11 | Matsushita Electric Industrial Co., Ltd. | Silicon structure, method for producing the same, and solar battery using the silicon structure |
US6194030B1 (en) | 1999-03-18 | 2001-02-27 | International Business Machines Corporation | Chemical vapor deposition velocity control apparatus |
IT1312150B1 (en) * | 1999-03-25 | 2002-04-09 | Lpe Spa | IMPROVED REACTION CHAMBER FOR EPITAXIAL REACTOR |
TW460942B (en) * | 1999-08-31 | 2001-10-21 | Mitsubishi Material Silicon | CVD device, purging method, method for determining maintenance time for a semiconductor making device, moisture content monitoring device, and semiconductor making device with such moisture content monitoring device |
US6475284B1 (en) * | 1999-09-20 | 2002-11-05 | Moore Epitaxial, Inc. | Gas dispersion head |
US6331212B1 (en) * | 2000-04-17 | 2001-12-18 | Avansys, Llc | Methods and apparatus for thermally processing wafers |
US6660126B2 (en) * | 2001-03-02 | 2003-12-09 | Applied Materials, Inc. | Lid assembly for a processing system to facilitate sequential deposition techniques |
KR100515052B1 (en) * | 2002-07-18 | 2005-09-14 | 삼성전자주식회사 | semiconductor manufacturing apparatus for depositing a material on semiconductor substrate |
US8328939B2 (en) * | 2004-05-12 | 2012-12-11 | Applied Materials, Inc. | Diffuser plate with slit valve compensation |
US7794667B2 (en) * | 2005-10-19 | 2010-09-14 | Moore Epitaxial, Inc. | Gas ring and method of processing substrates |
US9101898B2 (en) | 2006-03-29 | 2015-08-11 | Robert M. Zubrin | Portable gas generating device |
US9240513B2 (en) | 2010-05-14 | 2016-01-19 | Solarcity Corporation | Dynamic support system for quartz process chamber |
US9441295B2 (en) * | 2010-05-14 | 2016-09-13 | Solarcity Corporation | Multi-channel gas-delivery system |
JP2012195565A (en) * | 2011-02-28 | 2012-10-11 | Hitachi Kokusai Electric Inc | Substrate processing apparatus, substrate processing method, and manufacturing method of semiconductor device |
CN103628039A (en) * | 2012-08-28 | 2014-03-12 | 北京北方微电子基地设备工艺研究中心有限责任公司 | MOCVD reaction chamber and MOCVD apparatus |
CN103898473A (en) * | 2012-12-27 | 2014-07-02 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Process reaction chamber and process equipment |
CN104233225B (en) * | 2013-06-17 | 2017-03-22 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Reaction chamber and semiconductor treating equipment with same |
CN105839074A (en) * | 2015-02-03 | 2016-08-10 | Lg电子株式会社 | Metal organic chemical vapor deposition apparatus for solar cell |
JP2017518626A (en) | 2015-02-17 | 2017-07-06 | ソーラーシティ コーポレーション | Method and system for improving manufacturing yield of solar cells |
US9972740B2 (en) | 2015-06-07 | 2018-05-15 | Tesla, Inc. | Chemical vapor deposition tool and process for fabrication of photovoltaic structures |
US10378108B2 (en) * | 2015-10-08 | 2019-08-13 | Applied Materials, Inc. | Showerhead with reduced backside plasma ignition |
US9748434B1 (en) | 2016-05-24 | 2017-08-29 | Tesla, Inc. | Systems, method and apparatus for curing conductive paste |
US9954136B2 (en) | 2016-08-03 | 2018-04-24 | Tesla, Inc. | Cassette optimized for an inline annealing system |
US10115856B2 (en) | 2016-10-31 | 2018-10-30 | Tesla, Inc. | System and method for curing conductive paste using induction heating |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2378476A (en) * | 1943-02-11 | 1945-06-19 | American Optical Corp | Coating apparatus |
US2489127A (en) * | 1947-06-14 | 1949-11-22 | Rca Corp | High capacitance target |
NL78611C (en) * | 1951-11-10 | |||
GB760328A (en) * | 1953-06-10 | 1956-10-31 | Erie Resistor Ltd | Improvements in and relating to a process and apparatus for the production of thin deposits upon a support by decomposition of a gaseous material |
NL265823A (en) * | 1960-06-13 | |||
NL6700080A (en) * | 1966-01-03 | 1967-07-04 | ||
US3397094A (en) * | 1965-03-25 | 1968-08-13 | James E. Webb | Method of changing the conductivity of vapor deposited gallium arsenide by the introduction of water into the vapor deposition atmosphere |
US3424629A (en) * | 1965-12-13 | 1969-01-28 | Ibm | High capacity epitaxial apparatus and method |
US3517643A (en) * | 1968-11-25 | 1970-06-30 | Sylvania Electric Prod | Vapor deposition apparatus including diffuser means |
-
1970
- 1970-01-02 US US344A patent/US3603284A/en not_active Expired - Lifetime
- 1970-10-07 DE DE19702049229 patent/DE2049229A1/en active Pending
- 1970-12-08 FR FR7045274A patent/FR2075031A5/fr not_active Expired
- 1970-12-18 JP JP45113203A patent/JPS4822902B1/ja active Pending
- 1970-12-18 CH CH1878670A patent/CH516342A/en not_active IP Right Cessation
- 1970-12-21 CA CA101100A patent/CA922502A/en not_active Expired
- 1970-12-22 GB GB6072670A patent/GB1328838A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5517018Y2 (en) * | 1974-03-20 | 1980-04-21 |
Also Published As
Publication number | Publication date |
---|---|
GB1328838A (en) | 1973-09-05 |
FR2075031A5 (en) | 1971-10-08 |
CA922502A (en) | 1973-03-13 |
DE2049229A1 (en) | 1971-07-08 |
US3603284A (en) | 1971-09-07 |
CH516342A (en) | 1971-12-15 |