JPS4821421B1 - - Google Patents
Info
- Publication number
- JPS4821421B1 JPS4821421B1 JP1833369A JP1833369A JPS4821421B1 JP S4821421 B1 JPS4821421 B1 JP S4821421B1 JP 1833369 A JP1833369 A JP 1833369A JP 1833369 A JP1833369 A JP 1833369A JP S4821421 B1 JPS4821421 B1 JP S4821421B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Dicing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1833369A JPS4821421B1 (ja) | 1969-03-12 | 1969-03-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1833369A JPS4821421B1 (ja) | 1969-03-12 | 1969-03-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4821421B1 true JPS4821421B1 (ja) | 1973-06-28 |
Family
ID=11968700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1833369A Pending JPS4821421B1 (ja) | 1969-03-12 | 1969-03-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4821421B1 (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008112754A (ja) * | 2006-10-27 | 2008-05-15 | Hamamatsu Photonics Kk | 加工対象物切断方法 |
| JP2015233051A (ja) * | 2014-06-09 | 2015-12-24 | 株式会社ディスコ | ウェーハの分割方法 |
| JP2017212451A (ja) * | 2017-06-30 | 2017-11-30 | 三星ダイヤモンド工業株式会社 | 脆性材料基板の分断装置 |
-
1969
- 1969-03-12 JP JP1833369A patent/JPS4821421B1/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008112754A (ja) * | 2006-10-27 | 2008-05-15 | Hamamatsu Photonics Kk | 加工対象物切断方法 |
| JP2015233051A (ja) * | 2014-06-09 | 2015-12-24 | 株式会社ディスコ | ウェーハの分割方法 |
| JP2017212451A (ja) * | 2017-06-30 | 2017-11-30 | 三星ダイヤモンド工業株式会社 | 脆性材料基板の分断装置 |