JPS4820850B1 - - Google Patents
Info
- Publication number
- JPS4820850B1 JPS4820850B1 JP10298070A JP10298070A JPS4820850B1 JP S4820850 B1 JPS4820850 B1 JP S4820850B1 JP 10298070 A JP10298070 A JP 10298070A JP 10298070 A JP10298070 A JP 10298070A JP S4820850 B1 JPS4820850 B1 JP S4820850B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Transplanting Machines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10298070A JPS4820850B1 (ja) | 1970-11-21 | 1970-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10298070A JPS4820850B1 (ja) | 1970-11-21 | 1970-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4820850B1 true JPS4820850B1 (ja) | 1973-06-25 |
Family
ID=14341863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10298070A Pending JPS4820850B1 (ja) | 1970-11-21 | 1970-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4820850B1 (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5291348U (ja) * | 1975-12-27 | 1977-07-07 | ||
| JPS5612208Y2 (ja) * | 1976-06-01 | 1981-03-19 | ||
| KR20170097749A (ko) | 2015-02-04 | 2017-08-28 | 가부시키가이샤 히다치 고쿠사이 덴키 | 기판 처리 장치 및 반응관 |
| KR20200075009A (ko) * | 2017-11-16 | 2020-06-25 | 어플라이드 머티어리얼스, 인코포레이티드 | 고압 스팀 어닐링 프로세싱 장치 |
-
1970
- 1970-11-21 JP JP10298070A patent/JPS4820850B1/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5291348U (ja) * | 1975-12-27 | 1977-07-07 | ||
| JPS5612208Y2 (ja) * | 1976-06-01 | 1981-03-19 | ||
| KR20170097749A (ko) | 2015-02-04 | 2017-08-28 | 가부시키가이샤 히다치 고쿠사이 덴키 | 기판 처리 장치 및 반응관 |
| US10351951B2 (en) | 2015-02-04 | 2019-07-16 | Kokusai Electric Corporation | Substrate treatment apparatus including reaction tube with opened lower end, furnace opening member, and flange configured to cover upper surface of the furnace opening member |
| KR20200075009A (ko) * | 2017-11-16 | 2020-06-25 | 어플라이드 머티어리얼스, 인코포레이티드 | 고압 스팀 어닐링 프로세싱 장치 |