JPS4816441U - - Google Patents
Info
- Publication number
- JPS4816441U JPS4816441U JP5941471U JP5941471U JPS4816441U JP S4816441 U JPS4816441 U JP S4816441U JP 5941471 U JP5941471 U JP 5941471U JP 5941471 U JP5941471 U JP 5941471U JP S4816441 U JPS4816441 U JP S4816441U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1971059414U JPS5136285Y2 (ru) | 1971-07-06 | 1971-07-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1971059414U JPS5136285Y2 (ru) | 1971-07-06 | 1971-07-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4816441U true JPS4816441U (ru) | 1973-02-24 |
| JPS5136285Y2 JPS5136285Y2 (ru) | 1976-09-06 |
Family
ID=27947146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1971059414U Expired JPS5136285Y2 (ru) | 1971-07-06 | 1971-07-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5136285Y2 (ru) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5174668U (ru) * | 1974-12-09 | 1976-06-11 | ||
| JPS5191656U (ru) * | 1975-01-20 | 1976-07-22 | ||
| JPS5131331B1 (ru) * | 1970-06-16 | 1976-09-06 | ||
| JPS51137061U (ru) * | 1975-04-25 | 1976-11-05 | ||
| JPS51137062U (ru) * | 1975-04-25 | 1976-11-05 | ||
| JPS51148566U (ru) * | 1975-04-16 | 1976-11-29 | ||
| JPS52109924U (ru) * | 1976-02-17 | 1977-08-20 | ||
| JP2015081764A (ja) * | 2013-10-21 | 2015-04-27 | エーピー システムズ インコーポレイテッド | 支持装置、基板処理装置及び基板処理方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0311312U (ru) * | 1989-06-17 | 1991-02-04 |
-
1971
- 1971-07-06 JP JP1971059414U patent/JPS5136285Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0311312U (ru) * | 1989-06-17 | 1991-02-04 |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5131331B1 (ru) * | 1970-06-16 | 1976-09-06 | ||
| JPS5174668U (ru) * | 1974-12-09 | 1976-06-11 | ||
| JPS5191656U (ru) * | 1975-01-20 | 1976-07-22 | ||
| JPS51148566U (ru) * | 1975-04-16 | 1976-11-29 | ||
| JPS51137061U (ru) * | 1975-04-25 | 1976-11-05 | ||
| JPS51137062U (ru) * | 1975-04-25 | 1976-11-05 | ||
| JPS5435255Y2 (ru) * | 1975-04-25 | 1979-10-26 | ||
| JPS5512585Y2 (ru) * | 1975-04-25 | 1980-03-19 | ||
| JPS52109924U (ru) * | 1976-02-17 | 1977-08-20 | ||
| JP2015081764A (ja) * | 2013-10-21 | 2015-04-27 | エーピー システムズ インコーポレイテッド | 支持装置、基板処理装置及び基板処理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5136285Y2 (ru) | 1976-09-06 |