JPS4815155B1 - - Google Patents
Info
- Publication number
- JPS4815155B1 JPS4815155B1 JP6979770A JP6979770A JPS4815155B1 JP S4815155 B1 JPS4815155 B1 JP S4815155B1 JP 6979770 A JP6979770 A JP 6979770A JP 6979770 A JP6979770 A JP 6979770A JP S4815155 B1 JPS4815155 B1 JP S4815155B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US84907669A | 1969-08-11 | 1969-08-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4815155B1 true JPS4815155B1 (ja) | 1973-05-12 |
Family
ID=25305003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6979770A Pending JPS4815155B1 (ja) | 1969-08-11 | 1970-08-11 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS4815155B1 (ja) |
| DE (1) | DE2039416A1 (ja) |
| FR (1) | FR2056849A5 (ja) |
| GB (1) | GB1299945A (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3306870A1 (de) * | 1983-02-26 | 1984-08-30 | Leybold-Heraeus GmbH, 5000 Köln | Vorrichtung zum herstellen von schichten mit rotationssymmetrischem dickenprofil durch katodenzerstaeubung |
| DE3404880A1 (de) * | 1984-02-11 | 1985-08-14 | Glyco-Metall-Werke Daelen & Loos Gmbh, 6200 Wiesbaden | Verfahren zum herstellen von schichtwerkstoff oder schichtwerkstuecken |
| DE3725571A1 (de) * | 1987-08-01 | 1989-02-09 | Leybold Ag | Vorrichtung zum herstellen von schichten mit gleichmaessigem dickenprofil auf substraten durch kathodenzerstaeubung |
-
1970
- 1970-08-07 DE DE19702039416 patent/DE2039416A1/de active Pending
- 1970-08-10 GB GB3849270A patent/GB1299945A/en not_active Expired
- 1970-08-11 FR FR7029550A patent/FR2056849A5/fr not_active Expired
- 1970-08-11 JP JP6979770A patent/JPS4815155B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB1299945A (en) | 1972-12-13 |
| FR2056849A5 (ja) | 1971-05-14 |
| DE2039416A1 (de) | 1971-02-25 |