JPS48100076A - - Google Patents
Info
- Publication number
- JPS48100076A JPS48100076A JP47030775A JP3077572A JPS48100076A JP S48100076 A JPS48100076 A JP S48100076A JP 47030775 A JP47030775 A JP 47030775A JP 3077572 A JP3077572 A JP 3077572A JP S48100076 A JPS48100076 A JP S48100076A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- ing And Chemical Polishing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47030775A JPS48100076A (OSRAM) | 1972-03-29 | 1972-03-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47030775A JPS48100076A (OSRAM) | 1972-03-29 | 1972-03-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS48100076A true JPS48100076A (OSRAM) | 1973-12-18 |
Family
ID=12313046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47030775A Pending JPS48100076A (OSRAM) | 1972-03-29 | 1972-03-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS48100076A (OSRAM) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5325243A (en) * | 1976-08-20 | 1978-03-08 | Hitachi Ltd | Photooetching method |
| JPS5615042A (en) * | 1979-07-18 | 1981-02-13 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
| JPS57211731A (en) * | 1981-06-24 | 1982-12-25 | Fujitsu Ltd | Pattern formation by photo mask |
| JPS60207336A (ja) * | 1984-03-31 | 1985-10-18 | Rohm Co Ltd | ホトエツチング用露光方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4921898A (OSRAM) * | 1972-06-23 | 1974-02-26 |
-
1972
- 1972-03-29 JP JP47030775A patent/JPS48100076A/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4921898A (OSRAM) * | 1972-06-23 | 1974-02-26 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5325243A (en) * | 1976-08-20 | 1978-03-08 | Hitachi Ltd | Photooetching method |
| JPS5615042A (en) * | 1979-07-18 | 1981-02-13 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
| JPS57211731A (en) * | 1981-06-24 | 1982-12-25 | Fujitsu Ltd | Pattern formation by photo mask |
| JPS60207336A (ja) * | 1984-03-31 | 1985-10-18 | Rohm Co Ltd | ホトエツチング用露光方法 |