JPS48100075A - - Google Patents

Info

Publication number
JPS48100075A
JPS48100075A JP3205372A JP3205372A JPS48100075A JP S48100075 A JPS48100075 A JP S48100075A JP 3205372 A JP3205372 A JP 3205372A JP 3205372 A JP3205372 A JP 3205372A JP S48100075 A JPS48100075 A JP S48100075A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3205372A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3205372A priority Critical patent/JPS48100075A/ja
Publication of JPS48100075A publication Critical patent/JPS48100075A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP3205372A 1972-03-29 1972-03-29 Pending JPS48100075A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3205372A JPS48100075A (enrdf_load_stackoverflow) 1972-03-29 1972-03-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3205372A JPS48100075A (enrdf_load_stackoverflow) 1972-03-29 1972-03-29

Publications (1)

Publication Number Publication Date
JPS48100075A true JPS48100075A (enrdf_load_stackoverflow) 1973-12-18

Family

ID=12348108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3205372A Pending JPS48100075A (enrdf_load_stackoverflow) 1972-03-29 1972-03-29

Country Status (1)

Country Link
JP (1) JPS48100075A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5480673A (en) * 1977-12-08 1979-06-27 Ibm Method of and device for producing epitaxial layer
JPS59204282A (ja) * 1983-05-06 1984-11-19 Fuji Xerox Co Ltd 薄膜形成方法および薄膜形成装置
JPS60137012A (ja) * 1983-12-26 1985-07-20 Ulvac Corp イオンビ−ムエピタキシヤル成長装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JOURNAL APPLIED PHYSIC#V42#N7=1971 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5480673A (en) * 1977-12-08 1979-06-27 Ibm Method of and device for producing epitaxial layer
JPS59204282A (ja) * 1983-05-06 1984-11-19 Fuji Xerox Co Ltd 薄膜形成方法および薄膜形成装置
JPS60137012A (ja) * 1983-12-26 1985-07-20 Ulvac Corp イオンビ−ムエピタキシヤル成長装置

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