JPS476397U - - Google Patents

Info

Publication number
JPS476397U
JPS476397U JP894471U JP894471U JPS476397U JP S476397 U JPS476397 U JP S476397U JP 894471 U JP894471 U JP 894471U JP 894471 U JP894471 U JP 894471U JP S476397 U JPS476397 U JP S476397U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP894471U
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP894471U priority Critical patent/JPS476397U/ja
Publication of JPS476397U publication Critical patent/JPS476397U/ja
Pending legal-status Critical Current

Links

JP894471U 1971-02-17 1971-02-17 Pending JPS476397U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP894471U JPS476397U (ja) 1971-02-17 1971-02-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP894471U JPS476397U (ja) 1971-02-17 1971-02-17

Publications (1)

Publication Number Publication Date
JPS476397U true JPS476397U (ja) 1972-09-21

Family

ID=27852664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP894471U Pending JPS476397U (ja) 1971-02-17 1971-02-17

Country Status (1)

Country Link
JP (1) JPS476397U (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5025860A (ja) * 1973-07-12 1975-03-18
JPS5424081A (en) * 1977-07-25 1979-02-23 Chino Works Ltd Inspector of material quality and like
JPS61104242A (ja) * 1984-10-29 1986-05-22 Hitachi Ltd 半導体ウェハ異物検査装置
JPS61104244A (ja) * 1984-10-29 1986-05-22 Hitachi Ltd 半導体ウエハ異物検出装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5025860A (ja) * 1973-07-12 1975-03-18
JPS5424081A (en) * 1977-07-25 1979-02-23 Chino Works Ltd Inspector of material quality and like
JPS61104242A (ja) * 1984-10-29 1986-05-22 Hitachi Ltd 半導体ウェハ異物検査装置
JPS61104244A (ja) * 1984-10-29 1986-05-22 Hitachi Ltd 半導体ウエハ異物検出装置

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