JPS476397U - - Google Patents
Info
- Publication number
- JPS476397U JPS476397U JP894471U JP894471U JPS476397U JP S476397 U JPS476397 U JP S476397U JP 894471 U JP894471 U JP 894471U JP 894471 U JP894471 U JP 894471U JP S476397 U JPS476397 U JP S476397U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP894471U JPS476397U (ja) | 1971-02-17 | 1971-02-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP894471U JPS476397U (ja) | 1971-02-17 | 1971-02-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS476397U true JPS476397U (ja) | 1972-09-21 |
Family
ID=27852664
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP894471U Pending JPS476397U (ja) | 1971-02-17 | 1971-02-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS476397U (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5025860A (ja) * | 1973-07-12 | 1975-03-18 | ||
JPS5424081A (en) * | 1977-07-25 | 1979-02-23 | Chino Works Ltd | Inspector of material quality and like |
JPS61104242A (ja) * | 1984-10-29 | 1986-05-22 | Hitachi Ltd | 半導体ウェハ異物検査装置 |
JPS61104244A (ja) * | 1984-10-29 | 1986-05-22 | Hitachi Ltd | 半導体ウエハ異物検出装置 |
-
1971
- 1971-02-17 JP JP894471U patent/JPS476397U/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5025860A (ja) * | 1973-07-12 | 1975-03-18 | ||
JPS5424081A (en) * | 1977-07-25 | 1979-02-23 | Chino Works Ltd | Inspector of material quality and like |
JPS61104242A (ja) * | 1984-10-29 | 1986-05-22 | Hitachi Ltd | 半導体ウェハ異物検査装置 |
JPS61104244A (ja) * | 1984-10-29 | 1986-05-22 | Hitachi Ltd | 半導体ウエハ異物検出装置 |