JPS473154U - - Google Patents

Info

Publication number
JPS473154U
JPS473154U JP408071U JP408071U JPS473154U JP S473154 U JPS473154 U JP S473154U JP 408071 U JP408071 U JP 408071U JP 408071 U JP408071 U JP 408071U JP S473154 U JPS473154 U JP S473154U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP408071U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP408071U priority Critical patent/JPS473154U/ja
Publication of JPS473154U publication Critical patent/JPS473154U/ja
Pending legal-status Critical Current

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  • Connection Of Plates (AREA)
JP408071U 1971-01-29 1971-01-29 Pending JPS473154U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP408071U JPS473154U (cs) 1971-01-29 1971-01-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP408071U JPS473154U (cs) 1971-01-29 1971-01-29

Publications (1)

Publication Number Publication Date
JPS473154U true JPS473154U (cs) 1972-09-02

Family

ID=27844610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP408071U Pending JPS473154U (cs) 1971-01-29 1971-01-29

Country Status (1)

Country Link
JP (1) JPS473154U (cs)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5189835A (ja) * 1975-02-04 1976-08-06 Kinzokunohodenmetsukihoho
JPS52150790A (en) * 1976-06-10 1977-12-14 Univ Sydney Process and apparatus for reactionary vacuum evaporation
JPS52156185A (en) * 1976-06-21 1977-12-26 Makoto Katsurai Horizontalltype discharge apparatus with cross magnetic field
JPS537585A (en) * 1976-07-10 1978-01-24 Makoto Katsurai Spattering apparatus of horizontalltype discharge with cross magnetic field
JPS53114787A (en) * 1977-03-18 1978-10-06 Ulvac Corp Target for high profitable sputtering apparatus

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5189835A (ja) * 1975-02-04 1976-08-06 Kinzokunohodenmetsukihoho
JPS52150790A (en) * 1976-06-10 1977-12-14 Univ Sydney Process and apparatus for reactionary vacuum evaporation
JPS572272B2 (cs) * 1976-06-10 1982-01-14
JPS52156185A (en) * 1976-06-21 1977-12-26 Makoto Katsurai Horizontalltype discharge apparatus with cross magnetic field
JPS5734348B2 (cs) * 1976-06-21 1982-07-22
JPS537585A (en) * 1976-07-10 1978-01-24 Makoto Katsurai Spattering apparatus of horizontalltype discharge with cross magnetic field
JPS53114787A (en) * 1977-03-18 1978-10-06 Ulvac Corp Target for high profitable sputtering apparatus
JPS579430B2 (cs) * 1977-03-18 1982-02-22

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