JPS4517178Y1 - - Google Patents
Info
- Publication number
- JPS4517178Y1 JPS4517178Y1 JP5089367U JP5089367U JPS4517178Y1 JP S4517178 Y1 JPS4517178 Y1 JP S4517178Y1 JP 5089367 U JP5089367 U JP 5089367U JP 5089367 U JP5089367 U JP 5089367U JP S4517178 Y1 JPS4517178 Y1 JP S4517178Y1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5089367U JPS4517178Y1 (en) | 1967-06-14 | 1967-06-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5089367U JPS4517178Y1 (en) | 1967-06-14 | 1967-06-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4517178Y1 true JPS4517178Y1 (en) | 1970-07-15 |
Family
ID=42845857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5089367U Expired JPS4517178Y1 (en) | 1967-06-14 | 1967-06-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4517178Y1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5246384A (en) * | 1975-10-07 | 1977-04-13 | Leybold Heraeus Verwaltung | Vacuum evaporation apparatus employing electron beam |
-
1967
- 1967-06-14 JP JP5089367U patent/JPS4517178Y1/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5246384A (en) * | 1975-10-07 | 1977-04-13 | Leybold Heraeus Verwaltung | Vacuum evaporation apparatus employing electron beam |