JPS445160Y1 - - Google Patents
Info
- Publication number
- JPS445160Y1 JPS445160Y1 JP1995466U JP1995466U JPS445160Y1 JP S445160 Y1 JPS445160 Y1 JP S445160Y1 JP 1995466 U JP1995466 U JP 1995466U JP 1995466 U JP1995466 U JP 1995466U JP S445160 Y1 JPS445160 Y1 JP S445160Y1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1995466U JPS445160Y1 (ja) | 1966-03-07 | 1966-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1995466U JPS445160Y1 (ja) | 1966-03-07 | 1966-03-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS445160Y1 true JPS445160Y1 (ja) | 1969-02-25 |
Family
ID=31754901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1995466U Expired JPS445160Y1 (ja) | 1966-03-07 | 1966-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS445160Y1 (ja) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4948572A (ja) * | 1972-09-12 | 1974-05-10 | ||
| JPS5555536A (en) * | 1978-10-20 | 1980-04-23 | Hitachi Ltd | Device for treating surface under vacuum |
| JPS58223320A (ja) * | 1982-06-22 | 1983-12-24 | Ushio Inc | 不純物拡散方法 |
| JPS6024019A (ja) * | 1984-05-25 | 1985-02-06 | Hitachi Ltd | 表面処理装置 |
| JPS62181422A (ja) * | 1985-10-26 | 1987-08-08 | Nissho Giken Kk | 光照射装置 |
-
1966
- 1966-03-07 JP JP1995466U patent/JPS445160Y1/ja not_active Expired
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4948572A (ja) * | 1972-09-12 | 1974-05-10 | ||
| JPS5745714B2 (ja) * | 1972-09-12 | 1982-09-29 | ||
| JPS5555536A (en) * | 1978-10-20 | 1980-04-23 | Hitachi Ltd | Device for treating surface under vacuum |
| JPS6335711B2 (ja) * | 1978-10-20 | 1988-07-15 | Hitachi Ltd | |
| JPS58223320A (ja) * | 1982-06-22 | 1983-12-24 | Ushio Inc | 不純物拡散方法 |
| JPS6024019A (ja) * | 1984-05-25 | 1985-02-06 | Hitachi Ltd | 表面処理装置 |
| JPS62181422A (ja) * | 1985-10-26 | 1987-08-08 | Nissho Giken Kk | 光照射装置 |