JPS434952Y1 - - Google Patents

Info

Publication number
JPS434952Y1
JPS434952Y1 JP1626665U JP1626665U JPS434952Y1 JP S434952 Y1 JPS434952 Y1 JP S434952Y1 JP 1626665 U JP1626665 U JP 1626665U JP 1626665 U JP1626665 U JP 1626665U JP S434952 Y1 JPS434952 Y1 JP S434952Y1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1626665U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1626665U priority Critical patent/JPS434952Y1/ja
Publication of JPS434952Y1 publication Critical patent/JPS434952Y1/ja
Expired legal-status Critical Current

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Landscapes

  • Weting (AREA)
JP1626665U 1965-03-03 1965-03-03 Expired JPS434952Y1 (hu)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1626665U JPS434952Y1 (hu) 1965-03-03 1965-03-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1626665U JPS434952Y1 (hu) 1965-03-03 1965-03-03

Publications (1)

Publication Number Publication Date
JPS434952Y1 true JPS434952Y1 (hu) 1968-03-02

Family

ID=31751071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1626665U Expired JPS434952Y1 (hu) 1965-03-03 1965-03-03

Country Status (1)

Country Link
JP (1) JPS434952Y1 (hu)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01302814A (ja) * 1988-05-31 1989-12-06 Shin Etsu Handotai Co Ltd 半導体ウェーハ保持装置の保持溝形成方法
JPH0273733U (hu) * 1988-11-28 1990-06-05

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01302814A (ja) * 1988-05-31 1989-12-06 Shin Etsu Handotai Co Ltd 半導体ウェーハ保持装置の保持溝形成方法
JPH0273733U (hu) * 1988-11-28 1990-06-05

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