JPS434952Y1 - - Google Patents
Info
- Publication number
- JPS434952Y1 JPS434952Y1 JP1626665U JP1626665U JPS434952Y1 JP S434952 Y1 JPS434952 Y1 JP S434952Y1 JP 1626665 U JP1626665 U JP 1626665U JP 1626665 U JP1626665 U JP 1626665U JP S434952 Y1 JPS434952 Y1 JP S434952Y1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1626665U JPS434952Y1 (hu) | 1965-03-03 | 1965-03-03 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1626665U JPS434952Y1 (hu) | 1965-03-03 | 1965-03-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS434952Y1 true JPS434952Y1 (hu) | 1968-03-02 |
Family
ID=31751071
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1626665U Expired JPS434952Y1 (hu) | 1965-03-03 | 1965-03-03 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS434952Y1 (hu) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01302814A (ja) * | 1988-05-31 | 1989-12-06 | Shin Etsu Handotai Co Ltd | 半導体ウェーハ保持装置の保持溝形成方法 |
JPH0273733U (hu) * | 1988-11-28 | 1990-06-05 |
-
1965
- 1965-03-03 JP JP1626665U patent/JPS434952Y1/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01302814A (ja) * | 1988-05-31 | 1989-12-06 | Shin Etsu Handotai Co Ltd | 半導体ウェーハ保持装置の保持溝形成方法 |
JPH0273733U (hu) * | 1988-11-28 | 1990-06-05 |