JPS4327085Y1 - - Google Patents
Info
- Publication number
- JPS4327085Y1 JPS4327085Y1 JP9097466U JP9097466U JPS4327085Y1 JP S4327085 Y1 JPS4327085 Y1 JP S4327085Y1 JP 9097466 U JP9097466 U JP 9097466U JP 9097466 U JP9097466 U JP 9097466U JP S4327085 Y1 JPS4327085 Y1 JP S4327085Y1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9097466U JPS4327085Y1 (US20100268047A1-20101021-C00003.png) | 1966-09-30 | 1966-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9097466U JPS4327085Y1 (US20100268047A1-20101021-C00003.png) | 1966-09-30 | 1966-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4327085Y1 true JPS4327085Y1 (US20100268047A1-20101021-C00003.png) | 1968-11-09 |
Family
ID=31826185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9097466U Expired JPS4327085Y1 (US20100268047A1-20101021-C00003.png) | 1966-09-30 | 1966-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4327085Y1 (US20100268047A1-20101021-C00003.png) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4955275A (US20100268047A1-20101021-C00003.png) * | 1972-09-29 | 1974-05-29 | ||
| JPS5039885A (US20100268047A1-20101021-C00003.png) * | 1973-08-11 | 1975-04-12 | ||
| JPS5060184A (US20100268047A1-20101021-C00003.png) * | 1973-09-21 | 1975-05-23 | ||
| JPS5120868B1 (US20100268047A1-20101021-C00003.png) * | 1969-02-18 | 1976-06-28 | ||
| JPS5132357Y1 (US20100268047A1-20101021-C00003.png) * | 1970-12-29 | 1976-08-12 | ||
| JPS5516272A (en) * | 1978-07-21 | 1980-02-04 | Nec Corp | Laminar portion material heating device |
| JPS5618413A (en) * | 1979-07-23 | 1981-02-21 | Toshiba Corp | Apparatus for vapor growth of compound semiconductor |
| JPS6066809A (ja) * | 1983-09-24 | 1985-04-17 | Semiconductor Energy Lab Co Ltd | 半導体装置製造用電気炉 |
-
1966
- 1966-09-30 JP JP9097466U patent/JPS4327085Y1/ja not_active Expired
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5120868B1 (US20100268047A1-20101021-C00003.png) * | 1969-02-18 | 1976-06-28 | ||
| JPS5132357Y1 (US20100268047A1-20101021-C00003.png) * | 1970-12-29 | 1976-08-12 | ||
| JPS4955275A (US20100268047A1-20101021-C00003.png) * | 1972-09-29 | 1974-05-29 | ||
| JPS5314343B2 (US20100268047A1-20101021-C00003.png) * | 1972-09-29 | 1978-05-17 | ||
| JPS5039885A (US20100268047A1-20101021-C00003.png) * | 1973-08-11 | 1975-04-12 | ||
| JPS5060184A (US20100268047A1-20101021-C00003.png) * | 1973-09-21 | 1975-05-23 | ||
| JPS5420117B2 (US20100268047A1-20101021-C00003.png) * | 1973-09-21 | 1979-07-20 | ||
| JPS5516272A (en) * | 1978-07-21 | 1980-02-04 | Nec Corp | Laminar portion material heating device |
| JPS5618413A (en) * | 1979-07-23 | 1981-02-21 | Toshiba Corp | Apparatus for vapor growth of compound semiconductor |
| JPS6066809A (ja) * | 1983-09-24 | 1985-04-17 | Semiconductor Energy Lab Co Ltd | 半導体装置製造用電気炉 |
