JPS4111154Y1 - - Google Patents

Info

Publication number
JPS4111154Y1
JPS4111154Y1 JP4441664U JP4441664U JPS4111154Y1 JP S4111154 Y1 JPS4111154 Y1 JP S4111154Y1 JP 4441664 U JP4441664 U JP 4441664U JP 4441664 U JP4441664 U JP 4441664U JP S4111154 Y1 JPS4111154 Y1 JP S4111154Y1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4441664U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4441664U priority Critical patent/JPS4111154Y1/ja
Publication of JPS4111154Y1 publication Critical patent/JPS4111154Y1/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP4441664U 1964-06-05 1964-06-05 Expired JPS4111154Y1 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4441664U JPS4111154Y1 (enrdf_load_stackoverflow) 1964-06-05 1964-06-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4441664U JPS4111154Y1 (enrdf_load_stackoverflow) 1964-06-05 1964-06-05

Publications (1)

Publication Number Publication Date
JPS4111154Y1 true JPS4111154Y1 (enrdf_load_stackoverflow) 1966-05-25

Family

ID=31779129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4441664U Expired JPS4111154Y1 (enrdf_load_stackoverflow) 1964-06-05 1964-06-05

Country Status (1)

Country Link
JP (1) JPS4111154Y1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS593437A (ja) * 1982-06-30 1984-01-10 Fujitsu Ltd 半導体装置製造用基板

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS593437A (ja) * 1982-06-30 1984-01-10 Fujitsu Ltd 半導体装置製造用基板

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