JPH1195174A5 - - Google Patents

Info

Publication number
JPH1195174A5
JPH1195174A5 JP1997272114A JP27211497A JPH1195174A5 JP H1195174 A5 JPH1195174 A5 JP H1195174A5 JP 1997272114 A JP1997272114 A JP 1997272114A JP 27211497 A JP27211497 A JP 27211497A JP H1195174 A5 JPH1195174 A5 JP H1195174A5
Authority
JP
Japan
Prior art keywords
phase
regions
optical filter
phase region
phase regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997272114A
Other languages
English (en)
Japanese (ja)
Other versions
JP3893691B2 (ja
JPH1195174A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP27211497A priority Critical patent/JP3893691B2/ja
Priority claimed from JP27211497A external-priority patent/JP3893691B2/ja
Publication of JPH1195174A publication Critical patent/JPH1195174A/ja
Publication of JPH1195174A5 publication Critical patent/JPH1195174A5/ja
Application granted granted Critical
Publication of JP3893691B2 publication Critical patent/JP3893691B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP27211497A 1997-09-17 1997-09-17 結像光学系 Expired - Fee Related JP3893691B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27211497A JP3893691B2 (ja) 1997-09-17 1997-09-17 結像光学系

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27211497A JP3893691B2 (ja) 1997-09-17 1997-09-17 結像光学系

Publications (3)

Publication Number Publication Date
JPH1195174A JPH1195174A (ja) 1999-04-09
JPH1195174A5 true JPH1195174A5 (cg-RX-API-DMAC7.html) 2005-06-09
JP3893691B2 JP3893691B2 (ja) 2007-03-14

Family

ID=17509289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27211497A Expired - Fee Related JP3893691B2 (ja) 1997-09-17 1997-09-17 結像光学系

Country Status (1)

Country Link
JP (1) JP3893691B2 (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7593157B2 (en) 2004-11-29 2009-09-22 Nikon Corporation Zoom microscope
WO2008004679A1 (fr) 2006-07-04 2008-01-10 Nikon Corporation Dispositif à MICROSCOPE
NL2004323A (en) * 2009-04-16 2010-10-18 Asml Netherlands Bv Device manufacturing method and lithographic apparatus.
EP2610662B1 (en) * 2010-08-25 2018-04-04 Nikon Corporation Microscope optical assembly and microscope system

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