JPH1194528A - Appearance inspection device - Google Patents

Appearance inspection device

Info

Publication number
JPH1194528A
JPH1194528A JP25218497A JP25218497A JPH1194528A JP H1194528 A JPH1194528 A JP H1194528A JP 25218497 A JP25218497 A JP 25218497A JP 25218497 A JP25218497 A JP 25218497A JP H1194528 A JPH1194528 A JP H1194528A
Authority
JP
Japan
Prior art keywords
image
outer peripheral
peripheral surface
face
camera
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25218497A
Other languages
Japanese (ja)
Inventor
Masahiko Fukawa
雅彦 府川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NSK Ltd
Original Assignee
NSK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NSK Ltd filed Critical NSK Ltd
Priority to JP25218497A priority Critical patent/JPH1194528A/en
Publication of JPH1194528A publication Critical patent/JPH1194528A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a low cost appearance inspection device wherein, with a to-be-inspected body not rotated, images of all end surfaces and outer peripheral surface are obtained while a time required for inspection is shortened. SOLUTION: An appearance inspection device 1 inspects the appearance of a to-be-inspected body 2 wherein, formed into a truncated cone, cylinder, and doughnut, etc., a flat end surface 3 and an outer peripheral surface 4 adjoining the end surface 3 are comprised, with a box-like member 6, a reflection member 7, and a camera 9, etc., provided. The box-like member 6 is provided with a lighting device 5 and a half mirror 15. The reflection member 7 comprises, as one body, a bottom part 17 on which the to-be-inspected body 2 is placed and a conical part 18 so extending from the edge of the bottom part 17 as its diameter gradually increases as advancing to the camera 9. An inside surface 18a of the conical part 18 is formed into a mirror surface. Relating to the reflection member 7, the image of the outer peripheral surface 4 is reflected on the inside surface 18a, introduced up to the camera 9. The camera 9 comprises a lens part 27 and an area sensor 8. The area sensor 8 images the entire pictures of the end surface 3 and the outer peripheral surface 4.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、裁頭円錐状、円筒
状及び円環状などに形成された被検査体の外観を検査す
る外観検査装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an appearance inspection apparatus for inspecting the appearance of an object to be inspected formed in a frusto-conical shape, a cylindrical shape, an annular shape, or the like.

【0002】[0002]

【従来の技術】従来、裁頭円錐状、円筒状及び円環状の
うちいずれかに形成され、かつ平坦に形成された端面と
この端面と隣接する外周面とを備えた被検査体の外観を
検査するために、図7に示すような外観検査装置51が
用いられている。
2. Description of the Related Art Conventionally, the appearance of an object to be inspected having an end face formed in any one of a frustoconical shape, a cylindrical shape, and an annular shape and having a flat surface and an outer peripheral surface adjacent to the end surface is described. For inspection, an appearance inspection device 51 as shown in FIG. 7 is used.

【0003】図7に例示された外観検査装置51は、前
述した端面53と外周面54とを備えて形成された被検
査体52の外観を検査する装置であって、端面53と相
対して配置された第1の撮像手段55と第1の光源56
と、外周面54と相対して配置された第2の撮像手段5
7と第2の光源58と、画像処理装置59などを備えて
いる。
A visual inspection apparatus 51 illustrated in FIG. 7 is an apparatus for inspecting the external appearance of a test object 52 formed with the above-described end face 53 and outer peripheral face 54, and is opposed to the end face 53. First imaging means 55 and first light source 56 disposed
And the second imaging means 5 arranged opposite to the outer peripheral surface 54
7, a second light source 58, an image processing device 59, and the like.

【0004】前記第1の撮像手段55は、第1の光源5
6が放射しかつ端面53によって反射された光によっ
て、この端面53の映像を得るようになっている。第2
の撮像手段57は、第2の光源58が放射しかつ外周面
54によって反射された光によって、この外周面54の
映像を得るようになっている。
[0004] The first imaging means 55 includes a first light source 5.
6 emits light and is reflected by the end face 53 so that an image of the end face 53 is obtained. Second
The imaging means 57 is adapted to obtain an image of the outer peripheral surface 54 by light emitted from the second light source 58 and reflected by the outer peripheral surface 54.

【0005】撮像手段55,57は、それぞれ、光電変
換素子をライン状に配列したラインセンサを備えたカメ
ラ(以下ラインセンサカメラと呼ぶ)または、光電変換
素子をマトリックス状に配列したエリアセンサを備えた
カメラ(以下エリアセンサカメラと呼ぶ)が用いられて
いる。
The image pickup means 55 and 57 each have a camera having a line sensor in which photoelectric conversion elements are arranged in a line (hereinafter referred to as a line sensor camera) or an area sensor in which photoelectric conversion elements are arranged in a matrix. Camera (hereinafter referred to as an area sensor camera).

【0006】ラインセンサカメラが用いられた場合に
は、前記外観検査装置51は、被検査体52を図示しな
い回転駆動装置などによって、図7に示す矢印Kに沿っ
て回転させて、端面53全ての映像及び外周面54全て
の映像を得ている。
When a line sensor camera is used, the visual inspection device 51 rotates the inspection object 52 along an arrow K shown in FIG. And the entire outer peripheral surface 54 are obtained.

【0007】また、エリアセンサカメラが用いられた場
合には、前記外観検査装置51は、端面53を検査する
場合には被検査体52を回転させる必要は無い。しか
し、外周面54を検査する際には、被検査体52を図示
中の矢印Kに沿って回転させて、外周面54全ての映像
を得ている。
When an area sensor camera is used, the visual inspection device 51 does not need to rotate the inspection object 52 when inspecting the end face 53. However, when inspecting the outer peripheral surface 54, the inspection object 52 is rotated along the arrow K in the drawing to obtain an image of the entire outer peripheral surface 54.

【0008】そして、前述したラインセンサカメラ及び
エリアセンサカメラいずれが用いられた場合において
も、画像処理装置59において、前述したように得られ
た端面53全て及び外周面54全ての映像に所定の画像
処理などを施して、被検査体52の外観の検査を行って
いる。
[0008] Regardless of whether the above-described line sensor camera or area sensor camera is used, the image processing device 59 adds a predetermined image to all the end faces 53 and the entire outer peripheral face 54 obtained as described above. The appearance of the inspection object 52 is inspected by performing processing and the like.

【0009】[0009]

【発明が解決しようとする課題】上述したように、従来
の外観検査装置51は、被検査体52の外観の映像、特
に外周面54全ての映像を得るためには、回転駆動装置
などを用いて、この被検査体52を少なくとも1回転す
る必要がある。さらに、端面53全ての映像を得る撮像
手段55と外周面54全ての映像を得る撮像手段57と
をそれぞれ設ける必要がある。
As described above, the conventional visual inspection device 51 uses a rotary driving device or the like to obtain an image of the external appearance of the inspection object 52, in particular, an image of the entire outer peripheral surface 54. Therefore, it is necessary to rotate the test object 52 at least once. Further, it is necessary to provide an image pickup means 55 for obtaining an image of the entire end face 53 and an image pickup means 57 for obtaining an image of the entire outer peripheral surface 54, respectively.

【0010】このため、この装置51自体のコストが高
騰する傾向となるとともに、被検査体52を少なくとも
1回転するので、検査に必要とされる時間が長くなっ
て、単位時間あたりに検査できる被検査体の個数が少な
くなる。
As a result, the cost of the apparatus 51 itself tends to increase, and at least one rotation of the test object 52 increases the time required for the test. The number of test objects is reduced.

【0011】本発明は前記事情に着目してなされたもの
で、その目的とするところは、被検査体を回転すること
なく、前記被検査体の端面全てと外周面全ての映像を得
ることができ、かつ装置自体のコストを抑制するととも
に検査に必要とされる時間を短縮できる外観検査装置を
提供することにある。
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances. It is an object of the present invention to obtain an image of the entire end face and the entire outer peripheral face of the test object without rotating the test object. It is an object of the present invention to provide a visual inspection apparatus capable of suppressing the cost of the apparatus itself and shortening the time required for the inspection.

【0012】[0012]

【課題を解決するための手段】前記課題を解決し目的を
達成するために、本発明の外観検査装置は、裁頭円錐
状、円筒状及び円環状のうちいずれかに形成され、かつ
平坦に形成された端面とこの端面と隣接する外周面とを
備えた被検査体の外観を検査する装置であって、前記被
検査体の外観の映像を撮像する撮像手段と、前記被検査
体の端面に撮像手段を相対して配置し、前記撮像手段に
よって前記被検査体の端面の映像を撮像する際に、前記
被検査体の外周面の映像を前記撮像手段に導く光路変更
手段と、を備えたことを特徴としている。
In order to solve the above-mentioned problems and to achieve the object, an appearance inspection apparatus according to the present invention is formed in any one of a frusto-conical shape, a cylindrical shape and an annular shape, and is flat. What is claimed is: 1. An apparatus for inspecting the appearance of an object to be inspected having a formed end surface and an outer peripheral surface adjacent to the end surface, comprising: an image pickup means for imaging an image of the external appearance of the object to be inspected; and an end surface of the object to be inspected. And an optical path changing unit that guides the image of the outer peripheral surface of the object to be inspected to the image pickup unit when the image of the end face of the object to be inspected is captured by the image capturing unit. It is characterized by that.

【0013】本発明の外観検査装置は、被検査体の端面
が撮像手段に相対して配置され、その端面の映像が撮像
される際に、光路変更手段が被検査体の外周面の映像を
撮像手段に導く。このため、被検査体を回転することな
く、前記被検査体の端面全て及び外周面全ての映像を同
時に得ることができる。
In the appearance inspection apparatus of the present invention, the end face of the object to be inspected is arranged opposite to the image pickup means, and when the image of the end face is picked up, the optical path changing means changes the image of the outer peripheral surface of the object to be inspected. Guide to imaging means. Therefore, it is possible to simultaneously obtain images of the entire end face and the entire outer peripheral face of the test object without rotating the test object.

【0014】[0014]

【発明の実施の形態】以下、本発明の一実施形態につい
て、図1から図6を参照して説明する。外観検査装置1
は、裁頭円錐状、円筒状及び円環状のうちいずれかに形
成された被検査体2の外観を検査する装置である。被検
査体2は、平坦に形成された端面3とこの端面3と隣接
する外周面4などを備えて形成されている。被検査体2
は、端面3と外周面4とを検査されるようになってい
る。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. Appearance inspection device 1
Is a device for inspecting the appearance of the test object 2 formed in any one of a frusto-conical shape, a cylindrical shape, and an annular shape. The test object 2 is formed to include a flat end surface 3 and an outer peripheral surface 4 adjacent to the end surface 3. Inspection object 2
Is designed to inspect the end face 3 and the outer peripheral face 4.

【0015】被検査体2として、例えば組み立て前、組
み立て中または組み立て後の裁頭円錐状、円筒状または
円環状に形成された各種軸受けや、これら軸受けなどに
用いられる軌道輪や円筒ころ及び円錐ころなどを対象と
している。
As the test object 2, for example, various bearings formed in a frusto-conical shape, a cylindrical shape, or an annular shape before, during or after assembling, and a track ring, a cylindrical roller, and a cone used for these bearings and the like. It is intended for rollers and the like.

【0016】外観検査装置1は、内部に照明装置5など
備えた箱状部材6と、前記被検査体2を載置する光路変
更手段としての反射部材7と、固体撮像素子(CCD)
などの光電変換素子からなる撮像手段としてのエリアセ
ンサ8を備えたカメラ9と、画像処理装置10などを備
えている。
The visual inspection apparatus 1 includes a box-shaped member 6 provided with an illumination device 5 and the like therein, a reflection member 7 as an optical path changing means on which the inspection object 2 is mounted, and a solid-state image sensor (CCD).
A camera 9 provided with an area sensor 8 as an image pickup means composed of a photoelectric conversion element such as the above, and an image processing device 10 are provided.

【0017】箱状部材6は、箱状に形成されているとと
もに、カメラ9が反射部材7に載置された被検査体2の
映像を得ることができるように、互いに相対する面1
1,12に、開口部13,14を形成している。
The box-shaped member 6 is formed in a box shape, and the surfaces 1 facing each other so that the camera 9 can obtain an image of the inspection object 2 placed on the reflection member 7.
Openings 13 and 14 are formed in 1 and 12.

【0018】箱状部材6の内部には、前記照明装置5と
ハーフミラー15とが設けられており、照明装置5から
放射された光がハーフミラー15によって反射されて、
一方の開口部14から反射部材7とこの反射部材7に載
置された被検査体2まで導かれるようになっている。
The illumination device 5 and the half mirror 15 are provided inside the box-shaped member 6. Light emitted from the illumination device 5 is reflected by the half mirror 15,
The light is guided from one opening 14 to the reflection member 7 and the inspection object 2 placed on the reflection member 7.

【0019】図示例では、照明装置5としてハロゲンラ
ンプを用いているが、発光ダイオードなどをマトリック
ス状に配置したものや、蛍光灯などを用いてもよい。ハ
ーフミラー15は、前記照明装置5から放射された光を
反射して一方の開口部14から反射部材7に導くととも
に、この反射部材7からの光をカメラ9まで透過するよ
うになっている。
In the illustrated example, a halogen lamp is used as the lighting device 5, but a device in which light-emitting diodes and the like are arranged in a matrix or a fluorescent lamp may be used. The half mirror 15 reflects the light emitted from the illumination device 5 and guides the light from one of the openings 14 to the reflection member 7, and transmits the light from the reflection member 7 to the camera 9.

【0020】反射部材7は、図4に示すように、円板状
に形成されかつ被検査体2の底面16と当接して被検査
体2を載置する底部17と、この底部17の縁からカメ
ラ9に向かって徐々に開口径が拡大するように延びて形
成されたすりばち部18とを一体に備えている。底部1
7に被検査体2が載置されると、端面3の映像はカメラ
9に導かれるようになっている。
As shown in FIG. 4, the reflecting member 7 is formed in a disk shape and is in contact with the bottom surface 16 of the device under test 2 to place the device under test 2 thereon, and an edge of the bottom portion 17. From the camera 9 to the camera 9 so as to gradually increase the opening diameter. Bottom 1
When the object 2 is placed on the object 7, an image of the end face 3 is guided to the camera 9.

【0021】反射部材7は、例えば金属やガラスなどか
ら構成されるとともに、前記すりばち部18の内面18
aつまり載置される被検査体2の外周面4と相対する面
は、アルミニウムなどを蒸着して鏡面状に形成されてい
る。
The reflecting member 7 is made of, for example, metal, glass, or the like.
a, that is, the surface facing the outer peripheral surface 4 of the test object 2 to be placed is formed in a mirror-like shape by evaporating aluminum or the like.

【0022】このように構成されることによって、すり
ばち部18は、底部17に、被検査体2が端面3をカメ
ラ9に相対して載置された際に、この被検査体2の外周
面4の映像をカメラ9に導くことができる。
With this configuration, when the inspection object 2 is placed on the bottom portion 17 with the end face 3 facing the camera 9, the outer peripheral surface of the inspection object 2 4 can be guided to the camera 9.

【0023】なお、被検査体2の外周面4の映像は、図
2に示すように、被検査体2の底面16とほぼ平行な虚
像G2として形成されるのが望ましい。虚像G2が底面
16とほぼ平行に形成されるときには、被検査体2の底
面16と外周面4とのなす角をΘとし、かつ底面16を
外周方向に延長して得られる延長面16cとすりばち部
18の内面18aとのなす角をΘ2とすると、以下に示
す式1が成立する。
It is desirable that the image of the outer peripheral surface 4 of the inspection object 2 be formed as a virtual image G2 substantially parallel to the bottom surface 16 of the inspection object 2 as shown in FIG. When the virtual image G2 is formed substantially parallel to the bottom surface 16, the angle between the bottom surface 16 of the test object 2 and the outer peripheral surface 4 is set to Θ, and the extended surface 16c obtained by extending the bottom surface 16 in the outer peripheral direction is slid. Assuming that the angle between the portion 18 and the inner surface 18a is Θ2, the following Expression 1 is established.

【0024】 Θ2(度)=(180−Θ)/2・・・・・式1 また、前記ΘとΘ2との間に式1に示す関係を満たして
いるのであれば、外周面4の虚像G2が底面16と平行
に形成されて、外周面4の映像がカメラ9に導かれるこ
ととなる。そして、図3に示すように、カメラ9のエリ
アセンサ8に、端面3の映像U1と、外周面4の映像G
1とが、ほぼ同心円上に結像される。なお、図3に示す
ように端面3全ての映像U1と外周面4全ての映像G1
とが互いに重なり合わずにエリアセンサ8に結像する範
囲であれば、前記ΘとΘ2とは互いに前記式1の関係を
満たさなくてもよい。
Θ2 (degrees) = (180−Θ) / 2 Expression 1 If the relationship shown in Expression 1 is satisfied between Θ and Θ2, a virtual image of the outer peripheral surface 4 is obtained. G <b> 2 is formed parallel to the bottom surface 16, and the image on the outer peripheral surface 4 is guided to the camera 9. Then, as shown in FIG. 3, an image U1 of the end face 3 and an image G
1 are imaged substantially concentrically. As shown in FIG. 3, all the images U1 on the end face 3 and all the images G1 on the outer peripheral face 4 are displayed.
If and are within the range in which an image is formed on the area sensor 8 without overlapping each other, Θ and Θ2 do not have to satisfy the relationship of Equation 1 with each other.

【0025】また、前記光路変更手段は、図5及び図6
に示すように、断面が三角形をなす円環状に形成された
反射部材19,20としてもよい。なお、図5及び図6
に示された反射部材19,20は、共に円筒状に形成さ
れた被検査体2aの端面3a及び外周面4aなどの外観
を検査する場合を示している。図5(A)及び図6
(A)は、それぞれ反射部材19,20の斜視図を示
し、図5(B)及び図6(B)は、それぞれ図5(A)
及び図6(A)に示されたb−b線に沿う断面図を示し
ている。
The optical path changing means is provided in each of FIGS.
As shown in (1), the reflection members 19 and 20 may be formed in an annular shape having a triangular cross section. 5 and 6
The reflective members 19 and 20 shown in FIG. 1 show a case where the appearance of the end face 3a and the outer peripheral face 4a of the test object 2a formed in a cylindrical shape is inspected. FIGS. 5A and 6
(A) shows a perspective view of the reflection members 19 and 20, respectively, and FIG. 5 (B) and FIG. 6 (B) respectively show FIG.
7A and 7B are cross-sectional views taken along the line bb shown in FIG.

【0026】図5に示された反射部材19は、円環状に
形成された内側空間21に被検査体2aを載置するよう
になっており、内側空間21を形成する内周面22が前
記カメラ9に向う方向に沿って形成されている。また、
反射部材19は、その外周面23がカメラ9に向かうに
したがって徐々に径が拡大するように形成されており、
前記内周面22と外周面23との間が中実材となってい
る。
The reflection member 19 shown in FIG. 5 is designed to place the test object 2a in an inner space 21 formed in an annular shape, and the inner peripheral surface 22 forming the inner space 21 is It is formed along the direction toward the camera 9. Also,
The reflecting member 19 is formed such that its diameter gradually increases as its outer peripheral surface 23 moves toward the camera 9.
The space between the inner peripheral surface 22 and the outer peripheral surface 23 is a solid material.

【0027】反射部材19は、ガラスなどの透明でかつ
大気より屈折率の大きな材質からなり、かつ前記内周面
22及び外周面23などの表面に研磨などが施されて滑
らかに形成されている。反射部材19は、被検査体2a
の外周面4aの映像を、大気との屈折率の違いなどによ
って前記外周面23で反射して、カメラ9に導くように
なっている。
The reflecting member 19 is made of a transparent material having a refractive index higher than that of the atmosphere, such as glass, and is formed smoothly by polishing the inner peripheral surface 22 and the outer peripheral surface 23. . The reflection member 19 includes the inspection object 2a.
The image of the outer peripheral surface 4a is reflected by the outer peripheral surface 23 due to a difference in refractive index from the atmosphere or the like, and is guided to the camera 9.

【0028】また、前記外周面23と被検査体2aの底
面16aが外周方向に延長されて形成された延長面16
bとのなす角Θ2と、被検査体2aの底面16aとその
外周面4aとのなす角Θとは、互いに前記式1に示され
た関係を満たすのが望ましく、被検査体2aの端面3a
全ての映像U1と外周面4a全ての映像G1とが互いに
重なり合わずにエリアセンサ8に結像されるのであれ
ば、前記式1を満たさなくてもよい。
The extension surface 16 formed by extending the outer peripheral surface 23 and the bottom surface 16a of the device under test 2a in the outer peripheral direction.
b, and the angle Θ between the bottom surface 16a of the test object 2a and the outer peripheral surface 4a thereof preferably satisfy the relationship shown in the above-described expression 1, and the end face 3a of the test object 2a
If all the images U1 and all the images G1 on the outer peripheral surface 4a are imaged on the area sensor 8 without overlapping each other, the expression 1 need not be satisfied.

【0029】図6に示された反射部材20は、円環状に
形成された内側空間24に被検査体2aを載置するよう
になっており、内側空間24を形成する内周面25が前
記カメラ9に向かうにしたがって徐々に径が拡大するよ
うに形成されている。また、反射部材20は、その外周
面26が前記カメラ9に向う方向に沿って形成されてお
り、前記内周面25と外周面26との間が中実材となっ
ている。
In the reflection member 20 shown in FIG. 6, the test object 2a is placed in an inner space 24 formed in an annular shape, and the inner peripheral surface 25 forming the inner space 24 is formed as described above. The diameter is gradually increased toward the camera 9. The outer peripheral surface 26 of the reflecting member 20 is formed along the direction toward the camera 9, and the space between the inner peripheral surface 25 and the outer peripheral surface 26 is a solid material.

【0030】反射部材20は、ガラスなどの透明でかつ
大気より屈折率の大きな材質からなり、かつ前記内周面
25及び外周面26などの表面に研磨などが施されて滑
らかに形成されている。反射部材20は、被検査体2a
の外周面4aの映像を、大気との屈折率の違いなどによ
って前記内周面25で反射して、カメラ9に導くように
なっている。なお、この形状の場合、反射部材20をガ
ラスに代え金属製とし、テーパ面つまり前記内周面25
を鏡面とするか、あるいはガラス製として、テーパ面つ
まり前記内周面25にアルミ等を蒸着するようにしても
よい。
The reflection member 20 is made of a transparent material having a refractive index higher than that of the atmosphere, such as glass, and is formed smoothly by polishing the surfaces such as the inner peripheral surface 25 and the outer peripheral surface 26. . The reflection member 20 includes the inspection object 2a.
The image of the outer peripheral surface 4a is reflected by the inner peripheral surface 25 due to a difference in the refractive index from the atmosphere or the like, and is guided to the camera 9. In this case, the reflecting member 20 is made of metal instead of glass, and has a tapered surface, that is, the inner peripheral surface 25.
May be made a mirror surface or made of glass, and aluminum or the like may be deposited on the tapered surface, that is, the inner peripheral surface 25.

【0031】また、前記内周面25と被検査体2aの底
面16aが外周方向に延長されて形成された延長面16
bとのなす角Θ2と、被検査体2aの底面16aとその
外周面4aとのなす角Θとは、互いに前記式1に示され
た関係を満たすのが望ましく、被検査体2aの端面3a
全ての映像U1と外周面4a全ての映像G1とが互いに
重なり合わずにエリアセンサ8に結像されるのであれ
ば、前記式1を満たさなくてもよい。
An extended surface 16 formed by extending the inner peripheral surface 25 and the bottom surface 16a of the device under test 2a in the outer peripheral direction.
b, and the angle Θ between the bottom surface 16a of the test object 2a and the outer peripheral surface 4a thereof preferably satisfy the relationship shown in the above-described expression 1, and the end face 3a of the test object 2a
If all the images U1 and all the images G1 on the outer peripheral surface 4a are imaged on the area sensor 8 without overlapping each other, the expression 1 need not be satisfied.

【0032】前記カメラ9は、レンズ部27と、前記エ
リアセンサ8などを備え、前記画像処理装置10と接続
している。レンズ部27は、図2に示すようにレンズ2
8を備え、被検査体2aからの映像をエリアセンサ8に
結像する焦点調節機構を有している。図示例においてレ
ンズ部27は、被検査体2の端面3の映像に焦点を合わ
せるようになっている。エリアセンサ8はCCDなどの
光電変換素子をマトリックス状に配列されて構成されて
いる。
The camera 9 includes a lens unit 27, the area sensor 8, and the like, and is connected to the image processing device 10. The lens unit 27 is, as shown in FIG.
And a focus adjustment mechanism for forming an image from the test object 2 a on the area sensor 8. In the illustrated example, the lens unit 27 focuses on an image of the end face 3 of the test object 2. The area sensor 8 is configured by arranging photoelectric conversion elements such as CCDs in a matrix.

【0033】前記被検査体2の端面3からエリアセンサ
8までの光路長と、外周面4からエリアセンサ8までの
光路長とは、被検査体2の大きさや形状などによって若
干の差が生じている。
The optical path length from the end surface 3 of the object 2 to the area sensor 8 and the optical path length from the outer peripheral surface 4 to the area sensor 8 have a slight difference depending on the size and shape of the object 2. ing.

【0034】このため、前述した若干の光路長の差によ
って後述する焦点ずれΔGが生じる。しかし、この焦点
ずれΔGは、被検査体2の端面3及び外周面4から検出
されるべき傷等より非常に小さいので、前記レンズ部2
7が端面3の映像に焦点を合わせても、エリアセンサ8
が撮像し画像処理装置10が所定の画像処理を行う際に
必要とされる分解能を確保でき、被検査体2の外観を検
査できる。
For this reason, the above-mentioned slight difference in the optical path length causes a defocus ΔG described later. However, since this defocus ΔG is much smaller than a flaw or the like to be detected from the end face 3 and the outer peripheral face 4 of the inspection object 2, the lens unit 2
Even if 7 focuses on the image of end face 3, area sensor 8
Can secure the resolution required when the image processing apparatus 10 performs predetermined image processing by taking an image, and can inspect the appearance of the inspection object 2.

【0035】また、画像処理装置10が所定の画像処理
を行う際に必要とされる分解能を確保できるのであれ
ば、前記レンズ部27は被検査体2の外周面4の映像に
焦点を合わせるようにしてもよい。
If the resolution required for the image processing apparatus 10 to perform predetermined image processing can be ensured, the lens unit 27 focuses on the image on the outer peripheral surface 4 of the test object 2. It may be.

【0036】被検査体2の外観を検査して検出しなけれ
ばならない傷等がさらに小さく、前述した焦点合わせ方
法では、必要な分解能が得られない場合には、端面3の
映像と外周面4の映像の中間付近に焦点を合わせるよう
にしてもよい。この場合、端面3及び外周面4のどちら
か一方に焦点を合わせる場合に比較して、端面3の映像
の焦点ずれと外周面4の映像の焦点ずれとが小さくなっ
て、必要な分解能を確保でき、より詳細な傷等を検出で
きるようになる。
In the case where the required resolution cannot be obtained by the above-described focusing method, the image of the end face 3 and the outer peripheral face 4 must be inspected. May be focused near the middle of the video. In this case, as compared with the case where one of the end face 3 and the outer peripheral face 4 is focused, the defocus of the image of the end face 3 and the defocus of the image of the outer peripheral face 4 are reduced, and the necessary resolution is secured. This makes it possible to detect more detailed flaws and the like.

【0037】また、前記レンズ部27の焦点調節機構を
用いずに、図示しない別体の駆動装置などを用いて、箱
状部材6と被検査体2を載置した反射部材7とを一体に
カメラ9に対し接離する方向に移動自在として、被検査
体2の端面3の映像または外周面4の映像のどちらか一
方または端面3の映像と外周面4の映像との中間付近に
焦点を合わせるようにしてもよい。
Further, the box-shaped member 6 and the reflecting member 7 on which the object 2 is placed are integrally formed by using a separate driving device (not shown) without using the focus adjusting mechanism of the lens portion 27. It is movable in the direction of coming and going with respect to the camera 9, and focuses on either one of the image of the end surface 3 or the image of the outer peripheral surface 4 of the inspected object 2 or the middle of the image of the end surface 3 and the image of the outer peripheral surface 4. You may make it match.

【0038】カメラ9のレンズ部27に前述した焦点調
節機構を備えることなしに、レンズ部27を予め、被検
査体2の端面3の映像または外周面4の映像のどちらか
一方または端面3の映像と外周面4の映像との中間付近
に焦点が合うように調節しておき、被検査体2を検査す
る度に、焦点を合わせ直すことなくしてもよい。この場
合、検査が高速化して、単位時間当りにより多くの被検
査体2の外観を検査できる。
Without providing the above-mentioned focus adjusting mechanism to the lens unit 27 of the camera 9, the lens unit 27 is previously provided with either the image of the end face 3 or the image of the outer peripheral surface 4 of the test object 2 or the image of the end face 3. The focus may be adjusted so as to be in the vicinity of an intermediate point between the image and the image on the outer peripheral surface 4, so that the focus does not need to be re-adjusted every time the inspection object 2 is inspected. In this case, the inspection speeds up, and the appearance of more inspected objects 2 can be inspected per unit time.

【0039】さらに、より詳細な傷等を検出するために
より細かな分解能が必要な場合には、以下に示すように
焦点を合せるようにしてもよい。端面3の映像に焦点が
合う位置と、外周面4の映像に焦点が合う位置とは、被
検査体2の大きさ及び形状などによって予め知ることが
できる。
Further, when a finer resolution is required to detect a more detailed flaw or the like, the focus may be adjusted as shown below. The position where the image of the end face 3 is in focus and the position where the image of the outer peripheral surface 4 is in focus can be known in advance by the size and shape of the inspection object 2.

【0040】そして、被検査体2と反射部材7とがセッ
トされると、まず、被検査体2の端面3の映像と外周面
4の映像のうちどちらか一方に焦点を合せて検査を行
う。そののち、他方の映像に焦点を合せて検査を行う。
焦点を調節する装置としては、前述したレンズ部27の
焦点調節機構や、箱状部材6と反射部材7とを一体にカ
メラ9に対し接離する方向に移動自在とする駆動装置な
どを用いてもよい。
When the inspection object 2 and the reflection member 7 are set, first, the inspection is performed by focusing on one of the image of the end surface 3 and the image of the outer peripheral surface 4 of the inspection object 2. . After that, the inspection is performed while focusing on the other image.
As a device for adjusting the focal point, the above-described focus adjusting mechanism of the lens unit 27, a driving device that allows the box-shaped member 6 and the reflecting member 7 to move integrally in the direction of coming and going with respect to the camera 9 and the like are used. Is also good.

【0041】この場合、被検査体2の端面3の映像及び
外周面4の映像とにおのおの焦点を合せるので、エリア
センサ8が撮像する映像の分解能がより細かくなって、
より詳細な欠陥を検出することができる。
In this case, since the image of the end face 3 and the image of the outer peripheral surface 4 of the inspection object 2 are respectively focused, the resolution of the image picked up by the area sensor 8 becomes finer.
More detailed defects can be detected.

【0042】また、図示しない制御装置などによって、
焦点を調節する機能、つまりレンズ部27の焦点調節機
構や箱状部材6と反射部材7とを一体にカメラ9に対し
接離する方向に移動自在とする駆動装置などを自動化し
てもよい。
Further, by a control device (not shown) or the like,
The function of adjusting the focus, that is, a focus adjusting mechanism of the lens unit 27, a driving device that enables the box-shaped member 6 and the reflecting member 7 to move integrally in the direction of coming and going with respect to the camera 9 and the like may be automated.

【0043】前述した焦点調節機構及び駆動装置などを
自動化した場合においても、被検査体2の端面3の映像
または外周面4のどちらか一方または、端面3の映像と
外周面4の映像との中間付近または、端面3の映像と外
周面4の映像と別々に、焦点を合せるようになってい
る。
Even when the focus adjustment mechanism and the driving device described above are automated, either one of the image of the end face 3 or the outer peripheral face 4 of the inspection object 2 or the image of the end face 3 and the image of the outer peripheral face 4 can be obtained. The image is focused near the middle or separately on the image of the end face 3 and the image of the outer peripheral face 4.

【0044】また、レンズ部27などに開口径の小さい
ピンホールを設けて、照明装置が放射する光量を多くし
かつ被写界深度を深くして、被検査体2の端面3の映像
と外周面4の映像とに同時に焦点が合うようにしてもよ
い。
Further, a pinhole having a small opening diameter is provided in the lens portion 27 or the like to increase the amount of light radiated from the illumination device and to increase the depth of field, so that the image of the end face 3 of the inspection object 2 and the outer periphery thereof are formed. The image of the surface 4 may be focused simultaneously.

【0045】この場合、ピンホールが被写界深度を深く
して同時に端面3の映像と外周面4の映像とに焦点が合
うので、確実により詳細な傷等を検出できるとともに、
検査が高速化して単位時間あたりにより多くの被検査体
2を検査することができる。
In this case, since the pinhole increases the depth of field and focuses on the image of the end face 3 and the image of the outer peripheral face 4 at the same time, it is possible to reliably detect more detailed flaws and the like.
The inspection speeds up, and more inspection objects 2 can be inspected per unit time.

【0046】画像処理装置10は、公知のCPU、RO
M及びRAMなどを有した演算装置であって、前記カメ
ラ9と接続して、このカメラ9のエリアセンサ8が撮像
した画像データに、所定の画像処理を施して、被検査体
2の端面3及び外周面4などの外観を検査する機能を有
している。
The image processing apparatus 10 includes a known CPU, RO
An arithmetic unit having an M, a RAM, and the like. The arithmetic unit is connected to the camera 9, performs predetermined image processing on image data captured by the area sensor 8 of the camera 9, and And a function for inspecting the appearance of the outer peripheral surface 4 and the like.

【0047】前述した構成によれば、被検査体2の外観
の検査を行う際には、まず、被検査体2と反射部材7と
をセットする。そして、照明装置5を作動させる。する
と、照明装置5が放射した光は、ハーフミラー15によ
って反射され、反射部材7に載置された被検査体2に導
かれることとなる。
According to the above-described configuration, when inspecting the appearance of the device under test 2, first, the device under test 2 and the reflection member 7 are set. Then, the lighting device 5 is operated. Then, the light emitted by the illumination device 5 is reflected by the half mirror 15 and guided to the test object 2 placed on the reflection member 7.

【0048】被検査体2に導かれた光によって、その端
面3の映像U1は図2に示す二点鎖線Pに示すように、
ハーフミラー15を透過して、エリアセンサ8に結像す
る。なお、図示例では、端面3の映像に焦点を合せた場
合を示している。そして、図3に示すように、エリアセ
ンサ8の略中央に端面3の映像U1が撮像されることと
なる。
The image U1 of the end face 3 of the light guided to the test object 2 is represented by a two-dot chain line P shown in FIG.
The light passes through the half mirror 15 and forms an image on the area sensor 8. The illustrated example shows a case where the image of the end face 3 is focused. Then, as shown in FIG. 3, an image U1 of the end face 3 is captured substantially at the center of the area sensor 8.

【0049】一方、外周面4の映像は、前述した被検査
体2まで導かれた光によって、反射部材7のすりばち部
18の内面18aによって反射される。このとき、被検
査体2の底面16と外周面4とのなす角Θと、底面16
の延長面16cとすりばち部18の内面18aとのなす
角Θ2とが、前記式1に示された関係を満足する場合に
は、外周面4の虚像G2は、図2に示すように、被検査
体2の底面16とほぼ平行に形成される。
On the other hand, the image of the outer peripheral surface 4 is reflected by the inner surface 18 a of the burring portion 18 of the reflecting member 7 by the light guided to the inspection object 2 described above. At this time, the angle Θ between the bottom surface 16 of the test object 2 and the outer peripheral surface 4 and the bottom surface 16
When the angle Θ2 formed between the extended surface 16c of the outer peripheral surface 4 and the inner surface 18a of the sliding portion 18 satisfies the relationship shown in the above equation 1, the virtual image G2 of the outer peripheral surface 4 is formed as shown in FIG. It is formed substantially parallel to the bottom surface 16 of the test object 2.

【0050】そして、外周面4の映像は、図2に示す一
点鎖線Q1,Q2に示すように、ハーフミラー15を透
過して、エリアセンサ8に導かれる。なお、図示例で
は、端面3の映像に焦点を合せているので、前述した光
路長の差によって、外周面4の映像は、図2に示すG3
のように、エリアセンサ8より、若干被検査体2よりの
位置に結像している。
Then, the image of the outer peripheral surface 4 is transmitted through the half mirror 15 and guided to the area sensor 8 as shown by alternate long and short dash lines Q1 and Q2 shown in FIG. In the illustrated example, since the image on the end face 3 is focused, the image on the outer peripheral face 4 is changed to G3 shown in FIG.
As shown in the figure, an image is slightly formed from the area sensor 8 on the position of the inspection object 2.

【0051】エリアセンサ8では、図示中の一点鎖線Q
1,Q2の互いの間に焦点ずれΔGが生じている。しか
し、前記光路長の差が微小であるため、焦点ずれΔGが
生じても、エリアセンサ8は、必要とされる分解能を確
保でき、確実に外周面4を検査することができる。そし
て、図3に示すように、外周面4の映像G1は、エリア
センサ8の周辺部でかつ前記端面3の映像U1とほぼ同
心円となる位置に撮像されることとなる。
In the area sensor 8, a dashed line Q
A defocus ΔG occurs between 1 and Q2. However, since the difference between the optical path lengths is small, even if the defocus ΔG occurs, the area sensor 8 can secure the required resolution and can reliably inspect the outer peripheral surface 4. Then, as shown in FIG. 3, the image G1 of the outer peripheral surface 4 is captured at a position around the area sensor 8 and substantially concentric with the image U1 of the end surface 3.

【0052】その後、エリアセンサ8に撮像された被検
査体2の端面3と外周面4との映像U1,G1は、画像
データとして、画像処理装置10において、所定の画像
処理が施される。そして、被検査体2の外観の検査が行
われる。
After that, the images U1 and G1 of the end face 3 and the outer peripheral face 4 of the test object 2 captured by the area sensor 8 are subjected to predetermined image processing in the image processing apparatus 10 as image data. Then, the appearance of the inspection object 2 is inspected.

【0053】本実施形態によれば、被検査体2がその端
面3をカメラ9に相対して反射部材7に載置されて撮像
される際に、反射部材7が外周面4の映像をすりばち部
18の内周面18aで反射してカメラ9に導く。このた
め、被検査体2を回転することなく、一つのカメラ9で
前記被検査体2の端面3全てと外周面4全ての映像を同
時に得ることができるとともに、端面3の映像を撮像す
るカメラと外周面4の映像を撮像するカメラとをそれぞ
れ設ける必要がない。
According to the present embodiment, when the inspection object 2 is mounted on the reflecting member 7 with the end face 3 facing the camera 9 and is imaged, the reflecting member 7 slides the image of the outer peripheral surface 4. The light is reflected by the inner peripheral surface 18 a of the portion 18 and guided to the camera 9. Therefore, a single camera 9 can simultaneously obtain images of all of the end face 3 and all of the outer peripheral face 4 without rotating the test object 2, and a camera that captures an image of the end face 3. There is no need to provide a camera that captures images of the outer peripheral surface 4.

【0054】したがって、被検査体2を回転させる回転
駆動装置などを用いる必要がなくかつカメラ9の数を抑
制できるので装置1自体のコストを抑制できる。さらに
検査時に被検査体2を回転する必要が無いので検査に必
要とされる時間を短縮することができ、単位時間あたり
により多くの被検査体2を検査することができる。
Accordingly, there is no need to use a rotary drive for rotating the device under test 2 and the number of cameras 9 can be reduced, so that the cost of the device 1 itself can be reduced. Further, since there is no need to rotate the test object 2 during the test, the time required for the test can be shortened, and more test objects 2 can be tested per unit time.

【0055】また、本実施形態においては、照明装置5
から放射されかつハーフミラー15によって反射されて
被検査体2まで導かれる光の光軸と、被検査体2の端面
3の映像の光軸と、反射部材7によってエリアセンサ8
へ導かれる外周面4の映像の光軸と、レンズ28の光軸
と、エリアセンサ8の中心とが略同一線上に位置して、
図2に示すように、あたかも一つの光軸Oを形成してい
る。
In this embodiment, the lighting device 5
The optical axis of the light radiated from the light source and reflected by the half mirror 15 to be guided to the test object 2, the optical axis of the image of the end face 3 of the test object 2, and the area sensor 8 by the reflection member 7
The optical axis of the image of the outer peripheral surface 4 guided to the optical sensor, the optical axis of the lens 28, and the center of the area sensor 8 are located substantially on the same line,
As shown in FIG. 2, one optical axis O is formed.

【0056】このため、被検査体2の底面16と外周面
4とのなす角Θと、反射部材7の内面18aと延長面1
6cとのなす角Θ2とが、前記式1の関係を満たすこと
により、端面3全てと外周面4全ての映像が同時にエリ
アセンサ8に撮像される。
For this reason, the angle Θ between the bottom surface 16 of the inspected object 2 and the outer peripheral surface 4, the inner surface 18 a of the reflecting member 7 and the extended surface 1
When the angle Θ2 between the end face 3c and the end face 3c satisfies the relationship of the above equation 1, the images of the entire end face 3 and the entire outer peripheral face 4 are simultaneously captured by the area sensor 8.

【0057】したがって、端面3がカメラ9に相対して
配置されて撮像される際に、外周面4の映像が確実にカ
メラ9に導かれることとなり、確実に被検査体2の外観
の検査を行うことができる。
Therefore, when the end face 3 is arranged opposite to the camera 9 and imaged, the image of the outer peripheral face 4 is reliably guided to the camera 9, and the appearance of the object 2 can be inspected without fail. It can be carried out.

【0058】[0058]

【発明の効果】本発明によれば、被検査体の端面に撮像
手段を相対して配置して端面の映像が撮像される際に、
光路変更手段によって被検査体の外周面の映像を撮像手
段に導くことができる。このため、被検査体を回転する
ことなく、前記被検査物の端面全てと外周面全ての映像
を同時に得ることができる。
According to the present invention, when an image pickup means is arranged on an end face of an object to be inspected and an image of the end face is picked up,
The image of the outer peripheral surface of the test object can be guided to the imaging means by the optical path changing means. For this reason, without rotating the object to be inspected, images of the entire end surface and the entire outer peripheral surface of the object can be simultaneously obtained.

【0059】このため、被検査体を回転させる回転駆動
装置などが必要なく、かつ端面の映像を撮像する撮像手
段と外周面を撮像する撮像手段とをそれぞれ設ける必要
がなく撮像手段の数を減らすことができる。
For this reason, there is no need for a rotary driving device for rotating the object to be inspected, and it is not necessary to provide an image pickup means for picking up an image of an end face and an image pickup means for picking up an outer peripheral surface, thereby reducing the number of image pickup means. be able to.

【0060】したがって、装置自体のコストを抑制する
ことができるとともに、検査時に被検査体を回転する必
要が無いので検査に必要とされる時間を短縮することが
でき、単位時間あたりにより多くの被検査体を検査する
ことができる。
Therefore, the cost of the apparatus itself can be suppressed, and the time required for the inspection can be shortened because the object to be inspected does not need to be rotated at the time of the inspection. The test object can be inspected.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施形態の外観検査装置の構成を示
す説明図。
FIG. 1 is an explanatory diagram showing a configuration of a visual inspection device according to an embodiment of the present invention.

【図2】同実施形態の被検査体からエリアセンサに至る
光路を示す図。
FIG. 2 is a diagram showing an optical path from an object to be inspected to an area sensor according to the embodiment.

【図3】同実施形態のエリアセンサが撮像する被検査体
の映像を示す図。
FIG. 3 is an exemplary view showing an image of an inspection object captured by the area sensor according to the embodiment.

【図4】同実施形態の反射部材の断面図。FIG. 4 is an exemplary sectional view of the reflecting member according to the embodiment;

【図5】図4に示された反射部材の変形例を示す図。FIG. 5 is a view showing a modification of the reflection member shown in FIG. 4;

【図6】図4に示された反射部材の変形例を示す図。FIG. 6 is a view showing a modification of the reflection member shown in FIG. 4;

【図7】従来の外観検査装置の構成を示す説明図。FIG. 7 is an explanatory diagram showing a configuration of a conventional visual inspection device.

【符号の説明】[Explanation of symbols]

1…外観検査装置 2…被検査体 3…端面 4…外周面 7…反射部材(光路変更手段) 8…エリアセンサ(撮像手段) 19…反射部材(光路変更手段) 20…反射部材(光路変更手段) DESCRIPTION OF SYMBOLS 1 ... Appearance inspection apparatus 2 ... Inspection object 3 ... End surface 4 ... Outer peripheral surface 7 ... Reflecting member (optical path changing means) 8 ... Area sensor (imaging means) 19 ... Reflecting member (optical path changing means) 20 ... Reflecting member (optical path changing) means)

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】裁頭円錐状、円筒状及び円環状のうちいず
れかに形成され、かつ平坦に形成された端面とこの端面
と隣接する外周面とを備えた被検査体の外観を検査する
装置であって、 前記被検査体の外観の映像を撮像する撮像手段と、 前記被検査体の端面に前記撮像手段を相対して配置し、
前記撮像手段によって前記被検査体の端面の映像を撮像
する際に、前記被検査体の外周面の映像を前記撮像手段
に導く光路変更手段と、を備えたことを特徴とする外観
検査装置。
The present invention inspects the appearance of an object to be inspected having an end surface formed in any one of a frustoconical shape, a cylindrical shape, and an annular shape and having a flat surface and an outer peripheral surface adjacent to the end surface. An apparatus, wherein: an imaging unit that captures an image of an appearance of the inspection object; and the imaging unit is disposed relative to an end surface of the inspection object,
An optical path changing unit for guiding an image of an outer peripheral surface of the object to be inspected to the image capturing unit when the image of the end surface of the object is imaged by the imaging unit.
JP25218497A 1997-09-17 1997-09-17 Appearance inspection device Pending JPH1194528A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25218497A JPH1194528A (en) 1997-09-17 1997-09-17 Appearance inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25218497A JPH1194528A (en) 1997-09-17 1997-09-17 Appearance inspection device

Publications (1)

Publication Number Publication Date
JPH1194528A true JPH1194528A (en) 1999-04-09

Family

ID=17233671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25218497A Pending JPH1194528A (en) 1997-09-17 1997-09-17 Appearance inspection device

Country Status (1)

Country Link
JP (1) JPH1194528A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011519016A (en) * 2007-12-14 2011-06-30 インテクプラス カンパニー、リミテッド Surface shape measuring system and measuring method using the same
JP2013007717A (en) * 2011-06-27 2013-01-10 Bridgestone Corp Inspection device and inspection method
JP2013148545A (en) * 2012-01-23 2013-08-01 Bridgestone Corp Inspection device and inspection method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011519016A (en) * 2007-12-14 2011-06-30 インテクプラス カンパニー、リミテッド Surface shape measuring system and measuring method using the same
JP2013007717A (en) * 2011-06-27 2013-01-10 Bridgestone Corp Inspection device and inspection method
JP2013148545A (en) * 2012-01-23 2013-08-01 Bridgestone Corp Inspection device and inspection method

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