JPH1190138A - Filter medium for gas and filter produced from same - Google Patents
Filter medium for gas and filter produced from sameInfo
- Publication number
- JPH1190138A JPH1190138A JP21317898A JP21317898A JPH1190138A JP H1190138 A JPH1190138 A JP H1190138A JP 21317898 A JP21317898 A JP 21317898A JP 21317898 A JP21317898 A JP 21317898A JP H1190138 A JPH1190138 A JP H1190138A
- Authority
- JP
- Japan
- Prior art keywords
- fiber
- filter medium
- filter
- gas
- phosphorus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Filtering Materials (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、気体中の不純物を濾
過するための気体用濾材及びこれから作成したフィルタ
ーに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas filter medium for filtering impurities in a gas and a filter made therefrom.
【０００２】[0002]
【従来の技術】気体用濾材には、水を分散剤にした湿式
抄造法によって作成されたものがあり、この種の濾材
は、低アルカリガラス系繊維や硼珪酸ガラス系繊維等を
抄造用の水（一般に川水の濾過水がよく使用される）で
スラリー状混合物にしてこれをメッシュですくい、メッ
シュ上に残留したシート状や紙状の混合物体を乾燥させ
るようにして作成されている。そして、前記濾材は、例
えば、半導体製造工程に必要なクリーンルームをつくる
ための気体用フィルターとして使用されている。2. Description of the Related Art Some filter media for gas are prepared by a wet papermaking method using water as a dispersant. This type of filter media is used for producing low alkali glass fibers or borosilicate glass fibers. The slurry is made into a slurry-like mixture with water (in general, filtered water of river water is often used), and the mixture is scooped with a mesh, and the sheet-like or paper-like mixture remaining on the mesh is dried. The filter medium is used, for example, as a gas filter for creating a clean room required for a semiconductor manufacturing process.
【０００３】しかしながら、上記フィルターによって得
られるクリーンルームでは、２５６Ｋ半導体の製造レベ
ルより集積度の高いＬＳＩ，ＶＬＳＩ等の半導体に関し
て良好な性能を有したものが製造できないという問題が
ある。このような問題は、バイオ系製品に関しても同様
である。[0003] However, in the clean room obtained by the above-mentioned filter, there is a problem that semiconductors such as LSIs and VLSIs having a higher degree of integration than those of 256K semiconductors having good performance cannot be manufactured. Such problems are the same for bio-based products.
【０００４】これは、フィルターとして使用される濾材
中を空気や窒素等の気体が通過するときに、濾材により
空気が汚染される（濾材中の硼素やリンが空気中に離脱
する、即ち二次汚染する）ためと考えられ、現在、この
ような問題のない濾材の開発が求められている。[0004] This is because when air or nitrogen or other gas passes through a filter medium used as a filter, air is contaminated by the filter medium (boron or phosphorus in the filter medium is released into the air, that is, secondary air is removed). At present, there is a demand for the development of a filter medium free from such problems.
【０００５】[0005]
【発明が解決しようとする課題】そこで、この発明で
は、非常に微小な粒子が捕集でき且つ濾材自体から硼素
やリンがほとんど発生しない気体用濾材及びこれから作
成したフィルターを提供することを課題とする。SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a filter medium for gas which can collect very fine particles and hardly generates boron or phosphorus from the filter medium itself, and a filter made therefrom. I do.
【０００６】[0006]
【課題を解決するための手段】この発明の気体用濾材
は、基礎材料として、純水中への硼素溶出量が１×１０
-6ｇ／繊維ｇ，６５℃×１２０hrs 以下であり且つリン
溶出量が２×１０-6ｇ／繊維ｇ，６５℃×１２０hrs 以
下である、繊維径が０．２μｍ〜２．６５μｍのガラス
繊維を使用し、前記ガラス繊維を純水を使って抄造して
形成してある。[MEANS FOR SOLVING THE PROBLEMS] A filter medium for gas of the present invention
Means that the amount of boron eluted into pure water is 1 × 10
-6g / g of fiber, 65 ° C × 120 hrs or less and phosphorus
Elution volume 2 × 10-6g / g of fiber, 65 ℃ × 120hrs or less
Lower glass with a fiber diameter of 0.2 μm to 2.65 μm
Using fiber, paper-making the glass fiber using pure water
It is formed.
【０００７】上記気体用濾材に関して、純水中への硼素
溶出量が１×１０-6ｇ／繊維ｇ，６５℃×１２０hrs 以
下であり且つリン溶出量が２×１０-6ｇ／繊維ｇ，６５
℃×１２０hrs 以下である、繊維径が５μｍ〜２１μｍ
の太径ガラス繊維を具備させ、前記太径ガラス繊維によ
り基礎材料のガラス繊維相互の結合を補強するようにし
てあることが好ましい。With respect to the gaseous filter medium, the amount of boron eluted into pure water is 1 × 10 −6 g / g fiber, the elution amount of phosphorus is 65 ° C. × 120 hrs or less, and the amount of phosphorus eluted is 2 × 10 −6 g / g fiber, 65
℃ × 120hrs or less, fiber diameter is 5μm ~ 21μm
It is preferable that the large-diameter glass fiber is provided to reinforce the bonding between the glass fibers of the base material.
【０００８】そして、他の発明のフィルターは、上記し
た気体用濾材により作成されている。[0008] A filter according to another invention is made of the above-described gas filter medium.
【０００９】[0009]
【作用】この出願の発明は次の作用を有する。The invention of this application has the following functions.
【００１０】この発明の気体用濾材は、純水中への硼素
溶出量が１×１０-6ｇ／繊維ｇ，６５℃×１２０hrs 以
下であり且つリン溶出量が２×１０-6ｇ／繊維ｇ，６５
℃×１２０hrs 以下であるガラス繊維により構成されて
いるから、空気が濾材を通過するときに濾材そのものか
ら発生するガス状の硼素やリンを非常に低く抑えること
が可能となり、他方、その繊維径が０．２μｍ〜２．６
５μｍに設定されているから非常に微小な空気通過路を
有する濾材を構成させることができ、その結果、非常に
微小な粒子をも捕集できることとなる。The gaseous filter medium of the present invention has a boron elution amount into pure water of 1 × 10 −6 g / g fiber, 65 ° C. × 120 hrs or less, and a phosphorus elution amount of 2 × 10 −6 g / fiber. g, 65
C. × 120 hrs or less, it is possible to suppress gaseous boron and phosphorus generated from the filter medium itself when air passes through the filter medium, and to reduce the fiber diameter. 0.2 μm to 2.6
Since it is set to 5 μm, a filter medium having a very small air passage can be formed, and as a result, very fine particles can be collected.
【００１１】ここで、この発明の濾材では、繊維径の上
記設定により単位重量当たりの繊維の表面積が非常に大
きくなり、繊維製造プロセス等で硼素やリン等の汚染物
が残留したり付着してしまうこととなるが、前記ガラス
繊維は純水により抄造して形成されているから、濾材を
通過した空気中のガス状の硼素やリンを０ｐｐｂまたは
それに近い値まで抑えることができる。Here, in the filter medium of the present invention, the surface area of the fiber per unit weight becomes extremely large due to the above setting of the fiber diameter, and contaminants such as boron and phosphorus remain or adhere during the fiber production process or the like. However, since the glass fiber is formed by papermaking with pure water, gaseous boron and phosphorus in the air that has passed through the filter medium can be suppressed to 0 ppb or a value close thereto.
【００１２】この発明のフィルターについても同様であ
る。The same applies to the filter of the present invention.
【００１３】[0013]
【実施例】以下、この出願の発明の構成を実施例として
示した図面に従って説明する。 （実施例１）この実施例のフィルターは、基礎材料とし
て石英ガラス繊維から成る細径繊維のみを使用してあ
り、抄造用の水として純水（イオン交換水：電導度１０
μｓ／cm）を使用している。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing the configuration of an embodiment of the present invention; (Example 1) The filter of this example uses only a fine fiber made of quartz glass fiber as a base material, and uses pure water (ion-exchanged water: conductivity 10) as water for papermaking.
μs / cm).
【００１４】上記した基礎材料となる細径繊維は濾過媒
体をなすものであり、その平均直径は0.85μm （分布0.
2 〜2.65μm ）程度に設定してある。The above-mentioned fine fibers serving as the basic material constitute a filtration medium, and have an average diameter of 0.85 μm (distribution of 0.
2 to 2.65 μm).
【００１５】前記フィルターを構成する濾材は、前記細
径繊維を純水に分散させ、次にアクリル酸エステル樹脂
エマルジョンをバインダーとして５重量％（対繊維）を
加えて抄き漉し、乾燥してシート状に形成している。The filter medium constituting the filter is prepared by dispersing the fine fibers in pure water, then adding 5% by weight (based on fibers) using an acrylate resin emulsion as a binder, filtering, drying and drying the sheet. It is formed in a shape.
【００１６】ここで、この実施例の濾材が実際にこの発
明の効果を有しているか否かを明らかにするため、濾材
の溶出試験及び測定用液の分析により得られた結果等を
以下の表１に示す。 〔濾材の溶出試験及び測定用液の分析〕 先ず、２〜３％の硝酸を未使用のポリプロピレン製容
器に入れて２４時間以上放置した後、超純水で５回以上
洗浄する。Here, in order to clarify whether or not the filter medium of this embodiment actually has the effect of the present invention, the results obtained by the dissolution test of the filter medium and the analysis of the measuring solution are described below. It is shown in Table 1. [Dissolution test of filter medium and analysis of measurement solution] First, 2-3% of nitric acid is put in an unused polypropylene container, left for 24 hours or more, and then washed with ultrapure water 5 times or more.
【００１７】試料は、プラスチック手袋をはめて調整
し、試料５ｇを１８μs ／cmの超純水100ml に入れ、６
５℃、１２０時間放置する。この際、試料は常に水中に
浸るようにしておく。 同時に試料なしを作り同一条件下で放置してブランク
する。 一定時間経過後、超純水で２回以上濾過用フィルター
を洗浄し、その上で試料を濾過し、濾液を測定用液とす
る。尚、一度使用した濾過用フィルタは使用しない。濾
過用フィルターはセルロースアセテート製の型式ＤＩＳ
ＭＩＣ−１３ＣＰを使用する。 得られた測定用液は高周波プラズマ発光分析装置ＩＣ
Ｐ（日本シャーレル・アッシュ社 ＩＣＡＰ−５７７）
で元素定量分析を行う。 〔試験結果〕The sample was prepared by putting on plastic gloves, and 5 g of the sample was placed in 100 ml of 18 μs / cm ultrapure water.
Leave at 5 ° C. for 120 hours. At this time, the sample is always immersed in water. At the same time, make no sample and leave it blank under the same conditions. After a certain period of time, the filter for filtration is washed twice or more with ultrapure water, and then the sample is filtered, and the filtrate is used as a measurement liquid. In addition, the filter for filtration used once is not used. The filter for filtration is made of cellulose acetate model DIS
Use MIC-13CP. The obtained liquid for measurement is a high frequency plasma emission spectrometer IC
P (Nihon Charel Ash Company ICAP-577)
Perform quantitative elemental analysis with. 〔Test results〕
【００１８】[0018]
【表１】 [Table 1]
【００１９】上記した表１から、この実施例の濾材と、
細径繊維に硼珪酸ガラス系繊維を使用し、抄造用の川水
濾過水を使用した比較例の濾材とを比べると、前者は後
者に対してナトリウム、リン、硼素が極めて少ないこと
が判る。 （実施例２〜８）この実施例の気体用濾材は、石英ガラ
ス繊維から成る細径繊維と前記細径繊維相互の結合を補
強するための少量の太径繊維とから構成されており、抄
造用の水として純水（イオン交換水、蒸留水）を使って
作成している。From Table 1 above, it can be seen that the filter medium of this embodiment
Comparing the filter medium of the comparative example using the borosilicate glass fiber as the fine fiber and using the filtered water for papermaking, it can be seen that the former has much less sodium, phosphorus and boron than the latter. (Examples 2 to 8) The filter medium for gas of this example is composed of small-diameter fibers made of quartz glass fiber and a small amount of large-diameter fibers for reinforcing the bonding between the small-diameter fibers. It is made using pure water (ion-exchanged water, distilled water) as water for use.
【００２０】細径繊維は上記実施例１とほぼ同様に構成
されており、異種混使用できる。又、太径繊維は８〜２
４μm 程度（５μm 〜７０μm 程度の範囲のものが使用
できる）に設定してある。The fine fibers have substantially the same structure as in the first embodiment, and can be used in different types. In addition, large diameter fiber is 8-2
It is set to about 4 μm (a range of about 5 μm to 70 μm can be used).
【００２１】尚、上記した太径繊維は濾材に実用上の機
械的強度（特に腰の強さ：スティフネス）を付与するも
のであり、目的に応じて異種混使用できる。これに使用
できる繊維としては、石英ガラス繊維、アラミッド樹脂
系繊維、Ｐ繊維（ＳｉＯ2 ：５５％，Ａｌ2 Ｏ3 ：３０
％，ＣａＯ：１０％・・・セントラルガラス社）や実質
的に純水中に硼素，リンを限度以上に溶出しないもの等
が使用でき、他方、バインダーとしては、アクリル酸エ
チルエステルエマルジョン、ポリテトラフルオロエチレ
ンエマルジョン、ポリエステルエマルジョン等が使用さ
れる（表記せず）。The above-mentioned large-diameter fibers impart practical mechanical strength (particularly stiffness: stiffness) to the filter medium, and can be used in a mixture of different types according to the purpose. Fibers usable for this purpose include quartz glass fiber, aramid resin fiber, and P fiber (SiO 2 : 55%, Al 2 O 3 : 30).
%, CaO: 10% ... Central Glass Co., Ltd.) and those which do not elute boron or phosphorus more than substantially in pure water can be used. On the other hand, as the binder, ethyl acrylate emulsion, polytetrafluoroethylene Fluoroethylene emulsion, polyester emulsion and the like are used (not shown).
【００２２】ここで、この実施例の濾材が実際にこの発
明の効果を有しているか否かを明らかにするため、濾材
の溶出試験及び測定用液の分析により得られた試験結果
等を以下の表２に示す。Here, in order to clarify whether or not the filter medium of this embodiment actually has the effect of the present invention, the test results obtained by the dissolution test of the filter medium and the analysis of the measuring solution are described below. Is shown in Table 2.
【００２３】尚、この試験の一部のものは、抄造に使用
する前に、繊維を純水又は稀硝酸（５％，１０％）で２
５℃，６５℃の温度下で前処理後、抄造処理を行った。
この前処理は石英繊維を２４時間、それぞれの処理液に
浸漬後、純水で３回水洗いしてから行った。 〔試験結果〕In some of the tests, the fibers were treated with pure water or dilute nitric acid (5%, 10%) before use in papermaking.
After the pretreatment at a temperature of 5 ° C. and 65 ° C., a papermaking treatment was performed.
This pretreatment was performed after the quartz fiber was immersed in each treatment solution for 24 hours and then washed three times with pure water. 〔Test results〕
【００２４】[0024]
【表２】 [Table 2]
【００２５】上記した表２から、この実施例の濾材と、
細径繊維に硼珪酸ガラス系繊維を使用し、抄紙用の川水
濾過水を使用した比較例の濾材とを比べると、前者は後
者に対してナトリウム、リン、硼素が極めて少ないこと
が判る。そして、この実施例２の濾材を上記した実施例
１の濾材と比較すると、前者が後者に対して引張強度が
ＭＤ方向及びＣＤ方向について優れていることも判る。 （実施例９）この実施例のものは、ポリテトラフルオロ
エチレン（ＰＴＦＥ）のフィルムを一軸延伸しすると共
にこれにポリエステル不織布で裏打ち補強したものであ
り、通気性を有する（風速５．３cm／sec 、圧損５０mm
H2O ）ものであった。From Table 2 above, it can be seen that the filter medium of this embodiment
Comparing the filter medium of the comparative example using borosilicate glass-based fiber as the fine fiber and using river water filtration water for papermaking, it can be seen that the former has much less sodium, phosphorus and boron than the latter. When the filter medium of Example 2 is compared with the filter medium of Example 1 described above, it is also found that the former has superior tensile strength to the latter in the MD direction and the CD direction. (Embodiment 9) In this embodiment, a polytetrafluoroethylene (PTFE) film is uniaxially stretched and reinforced with a polyester nonwoven fabric, and has air permeability (wind velocity 5.3 cm / sec). , Pressure loss 50mm
H 2 O).
【００２６】このものについて上記実施例１〜８と同様
に試験を行うと、溶出量は硼素０×１０-6ｇ／繊維ｇ，
６５℃×１２０hrs ，リン１×１０-6ｇ／繊維ｇ，６５
℃×１２０hrs であった。When this was tested in the same manner as in Examples 1 to 8, the elution amount was 0 × 10 −6 g of boron / g of fiber,
65 ° C. × 120 hrs, phosphorus 1 × 10 −6 g / g fiber, 65
C. x 120 hrs.
【００２７】尚、本発明においては、使用する濾材の濾
過体を純水中に硼素１×１０-6ｇ／繊維ｇ，６５℃×１
２０hrs （リン２×１０-6ｇ／繊維ｇ，６５℃×１２０
hrs）を超えて溶出しないような構成とすれば、ほぼ同
様の作用効果を有する。In the present invention, the filter body of the filter medium to be used is 1 × 10 −6 g of boron / g of fiber in pure water, 65 ° C. × 1.
20hrs (phosphorus 2 × 10 -6 g / g fiber, 65 ° C. × 120
If the composition does not elute beyond hrs), it has almost the same effect.
【００２８】又、本発明で使用するフッ素樹脂フィルム
としては、テトラフルオロエチレンとパーフルオロアル
キル基含有フッ素樹脂コポリマーでＴＦＥ−ＨＦＰ（ヘ
キサフルオロプロペン）等の高分子のフィルムを延伸
（一軸、二軸）したもののうち、上記通気性を有するも
のとすることもできる。As the fluororesin film used in the present invention, a film of a polymer such as TFE-HFP (hexafluoropropene) is stretched (uniaxially or biaxially) with a fluororesin copolymer containing tetrafluoroethylene and a perfluoroalkyl group. ) May have the above-mentioned air permeability.
【００２９】[0029]
【発明の効果】この出願の発明は、上述の如くの構成を
有するものであるから、次の効果を有する。Since the invention of this application has the above-described configuration, it has the following effects.
【００３０】作用の欄に記載した内容から、非常に微小
な粒子が捕集でき且つ濾材自体から硼素やリンがほとん
ど発生しない気体用濾材及びこれから作成したフィルタ
ーを提供できる。From the contents described in the column of action, it is possible to provide a filter medium for gas which can collect very fine particles and hardly generate boron or phosphorus from the filter medium itself, and a filter made therefrom.
Claims (3)
が１×１０-6ｇ／繊維ｇ，６５℃×１２０hrs 以下であ
り且つリン溶出量が２×１０-6ｇ／繊維ｇ，６５℃×１
２０hrs 以下である、繊維径が０．２μｍ〜２．６５μ
ｍのガラス繊維を使用し、前記ガラス繊維を純水を使っ
て抄造して形成してあることを特徴とする気体用濾材。As a basic material, the amount of boron eluted in pure water is 1 × 10 −6 g / g of fiber, the temperature is 65 ° C. × 120 hrs or less, and the amount of phosphorus eluted is 2 × 10 −6 g / g of fiber, 65 ° C x 1
The fiber diameter is 0.2 μm to 2.65 μm which is 20 hours or less.
m. A filter medium for gas, wherein the glass fiber is formed by paper-making using pure water.
繊維ｇ，６５℃×１２０hrs 以下であり且つリン溶出量
が２×１０-6ｇ／繊維ｇ，６５℃×１２０hrs 以下であ
る、繊維径が５μｍ〜２１μｍの太径ガラス繊維を具備
させ、前記太径ガラス繊維により基礎材料のガラス繊維
相互の結合を補強するようにしてあることを特徴とする
請求項１記載の気体用濾材。2. The amount of boron eluted in pure water is 1 × 10 −6 g /.
A large-diameter glass fiber having a fiber diameter of 5 to 21 μm and a fiber g of 65 ° C. × 120 hrs or less and a phosphorus elution amount of 2 × 10 −6 g / fiber of 65 ° C. × 120 hrs or less; 2. The gas filter medium according to claim 1, wherein the glass fibers of the base material are reinforced with each other by the glass fibers having a diameter.
作成されたことを特徴とするフィルター。3. A filter made of the filter medium for gas according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21317898A JPH1190138A (en) | 1992-08-07 | 1998-07-28 | Filter medium for gas and filter produced from same |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4211773A JPH0763575B2 (en) | 1992-08-07 | 1992-08-07 | Filter material for gas and filter made from this |
| JP21317898A JPH1190138A (en) | 1992-08-07 | 1998-07-28 | Filter medium for gas and filter produced from same |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4211773A Division JPH0763575B2 (en) | 1992-08-07 | 1992-08-07 | Filter material for gas and filter made from this |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1190138A true JPH1190138A (en) | 1999-04-06 |
Family
ID=16611357
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4211773A Expired - Fee Related JPH0763575B2 (en) | 1992-08-07 | 1992-08-07 | Filter material for gas and filter made from this |
| JP21317898A Pending JPH1190138A (en) | 1992-08-07 | 1998-07-28 | Filter medium for gas and filter produced from same |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4211773A Expired - Fee Related JPH0763575B2 (en) | 1992-08-07 | 1992-08-07 | Filter material for gas and filter made from this |
Country Status (1)
| Country | Link |
|---|---|
| JP (2) | JPH0763575B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008049333A (en) * | 2006-07-27 | 2008-03-06 | Mitsubishi Paper Mills Ltd | Composite filter medium and its manufacturing method |
| JP2010221177A (en) * | 2009-03-25 | 2010-10-07 | Duskin Co Ltd | Glass fiber filter |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5122048B2 (en) * | 1999-12-15 | 2013-01-16 | ホリングワース・アンド・ボーズ・カンパニー | Low boron content micro glass fiber filtration media |
| PT105900A (en) | 2011-09-23 | 2013-03-25 | Active Space Technologies Actividades Aeroespaciais S A | PASSIVE SOLAR MONITORING SYSTEM |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS596231A (en) * | 1982-07-05 | 1984-01-13 | Mitsubishi Rayon Co Ltd | Porous fluorocarbon resin membrane and its production |
| JPS59190799A (en) * | 1983-04-14 | 1984-10-29 | Onkyo Corp | Fitting method of diaphragm edge |
| DE3319849C1 (en) * | 1983-06-01 | 1984-11-22 | Degussa Ag, 6000 Frankfurt | Coating compositions made of plastisols or organosols and processes for improving the adhesion of these compositions to metallic substrates |
| JP2585244B2 (en) * | 1987-02-25 | 1997-02-26 | 株式会社日立製作所 | Chemical processing equipment |
| JP2521998B2 (en) * | 1987-12-22 | 1996-08-07 | 株式会社島津製作所 | Air filter |
| JPH07102293B2 (en) * | 1989-03-24 | 1995-11-08 | 北越製紙株式会社 | Glass fiber filter paper for high performance air filter and method for producing the same |
| JPH03202117A (en) * | 1989-12-28 | 1991-09-03 | Toshiba Ceramics Co Ltd | Silica glass filter and its preparation |
-
1992
- 1992-08-07 JP JP4211773A patent/JPH0763575B2/en not_active Expired - Fee Related
-
1998
- 1998-07-28 JP JP21317898A patent/JPH1190138A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008049333A (en) * | 2006-07-27 | 2008-03-06 | Mitsubishi Paper Mills Ltd | Composite filter medium and its manufacturing method |
| JP2010221177A (en) * | 2009-03-25 | 2010-10-07 | Duskin Co Ltd | Glass fiber filter |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0763575B2 (en) | 1995-07-12 |
| JPH0655019A (en) | 1994-03-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5122048B2 (en) | Low boron content micro glass fiber filtration media | |
| US3246767A (en) | Fluid-permeable materials and process of making the same | |
| US4855163A (en) | Method of making polyvinylidene difluoride structure | |
| EP0167535A1 (en) | Flexible air premeable non-woven fabric filters. | |
| CN109023727A (en) | A kind of preparation method for the micro/nano fibrous membrane material that can actively capture PM2.5 | |
| JPH1190138A (en) | Filter medium for gas and filter produced from same | |
| Tang et al. | Electrospinning fabrication of polystyrene-silica hybrid fibrous membrane for high-efficiency air filtration | |
| Rahmayanti et al. | Development of Nata de Coco-based transparent air masks | |
| CN109011922A (en) | A kind of preparation method of the PM2.5 filtering net film based on TPU nanofiber | |
| JPH03174091A (en) | Microscopic fiber material and production thereof | |
| JP3516222B2 (en) | Filter paper and air filter using the same | |
| JP6964033B2 (en) | Filter material for air filter | |
| JP3201189B2 (en) | Filter material | |
| JPH10180020A (en) | Flame retardant volume reduced high performance air filter filter medium and its production | |
| JP2003220310A (en) | Electret filter medium and method for producing the same | |
| JP2841151B2 (en) | Air filter and filtration system | |
| JPH0970512A (en) | Filter material for air filter and air filter | |
| JP2002018243A (en) | Method for manufacturing filter paper for air filter | |
| JPH11188212A (en) | Bornless filter | |
| CN106582109A (en) | Filter cloth material prepared from activated carbon and preparation method and application thereof | |
| JPH09141023A (en) | Filter paper of filter excellent in dust holding capacity | |
| Zhang et al. | Air filters fabricated by fibrillated lyocell fibres and polyethylene terephthalate fibres with implantation of cellulose nanofibrils for high-efficiency particulate matter removal | |
| William et al. | Preparation and Characterization of Microporous Cellulose Membranes as Potential Pathogen Filters | |
| CN111467878B (en) | Nanofiber/glass fiber composite filter material, preparation method and application thereof | |
| JPH07194911A (en) | Filter paper and air filter using the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20030722 |